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CAPACITANCE SENSING CIRCUIT FOR MEMBRANE PRESSURE SENSOR

  • US 20090158854A1
  • Filed: 03/03/2009
  • Published: 06/25/2009
  • Est. Priority Date: 10/18/2004
  • Status: Active Grant
First Claim
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1. A capacitance sensing circuit for a membrane pressure sensor, the sensing circuit comprising a controller, two switches, in signal communication with the controller, a charge amplifier and a charge injector, the charge amplifier is connected to the switches via a sensor capacitor Cs and a reference capacitor Cr, the sensor and reference capacitors are arranged in parallel with one another and a parasitic capacitance Cp to ground, the charge injector and amplifier are arranged in parallel connection between the capacitors and the controller, the controller is configured to determine a charge imbalance indicative of a pressure difference between membranes of the pressure sensor.

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