Shower head of chemical vapor deposition apparatus

• US 20090159001A1
• Filed: 08/09/2005
• Published: 06/25/2009
• Est. Priority Date: 08/11/2004
• Status: Abandoned Application

• Current Assignee: Eugene Technology Co., Ltd.
• Original Assignee: Eugene Technology Co., Ltd.
• Inventors: Um, Pyung-yong
• Application Number:
  US11/573,439
• Publication Number:
  US 20090159001A1
• Time in Patent Office: Days
• US Class Current: 118/715
• CPC Class Codes: C23C 16/45565 Shower nozzles

Abstract

There is provided a shower head capable of spraying a process reaction gas onto the surface of a semiconductor wafer to deposit the process reaction gas on the surface of the semiconductor wafer as a thin film of uniform thickness.

Claims

1. A shower head of a chemical vapor deposition apparatus comprising:

a chamber having a chamber inside so that a shower head and a heater are mounted therein;

a gas in port formed on one side so that a reaction gas is flown from the outside;

a chamber lead combined with the top surface of the chamber by fastening means to seal up the chamber;

a block plate in which the received reaction gas is distributed by through holes provided on the bottom surface of the chamber lead to form a low temperature region;

a plurality of spray holes for spraying the distributed reaction gas onto the surface of a wafer;

a shower head having a plurality of fastening holes formed along the outer circumference thereof to be fastened with the chamber lead; and

a heater on whose top surface the wafer is settled and on whose bottom surface a heater supporter is provided, the heater being provided in the chamber inside to be separated from the shower head by a predetermined distance,

wherein a plurality of main holes are formed in the center of the top surface of the shower head to be separated from each other by the same distance,

wherein a plurality of supplementary holes are separated from the main holes by the same distance to intersect the main holes,

wherein protrusions are formed in the center of the bottom surface of the shower head,

wherein an induction groove is provided between the protrusions to form the lower parts of the main holes and the supplementary holes, and

wherein the outer circumference of the induction groove is extended toward the lower part.

2. The shower head as claimed in claim 1, wherein the lower parts of the main holes and the supplementary holes formed from top to bottom are extended.