Gas distribution plate with annular plenum having a sloped ceiling for uniform distribution
First Claim
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1. A gas distribution plate comprising:
- a disk-shaped plate;
a first hollow annular plenum within or supported by said disk-shaped plate, said annular plenum being concentric with an axis of symmetry of said disk-shaped plate, said plenum comprising an annular floor and an annular ceiling facing said annular floor;
plural gas injection holes in said floor;
a gas injection port coupled to said plenum at a supply end of said plenum; and
said annular ceiling having a height above said annular floor, said height being maximum at said supply end of said plenum, said ceiling sloping toward said floor along an azimuthal path of said plenum whereby said height decreases along said azimuthal path.
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Abstract
A gas distribution plate for a plasma reactor has an annular gas distribution plenum with an array of gas injection holes and a gas injection port at one end of the annular plenum, the plenum being progressively constricted in cross-sectional area along its azimuthal path by a sloping ceiling.
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Citations
22 Claims
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1. A gas distribution plate comprising:
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a disk-shaped plate; a first hollow annular plenum within or supported by said disk-shaped plate, said annular plenum being concentric with an axis of symmetry of said disk-shaped plate, said plenum comprising an annular floor and an annular ceiling facing said annular floor; plural gas injection holes in said floor; a gas injection port coupled to said plenum at a supply end of said plenum; and said annular ceiling having a height above said annular floor, said height being maximum at said supply end of said plenum, said ceiling sloping toward said floor along an azimuthal path of said plenum whereby said height decreases along said azimuthal path. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A gas distribution plate comprising:
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a disk-shaped plate; a hollow annular plenum within or supported by said disk-shaped plate, said annular plenum being concentric with an axis of symmetry of said disk-shaped plate, said plenum comprising an annular floor and an annular ceiling facing said annular floor; plural gas injection holes in said floor; plural gas injection ports coupled to said plenum, said injection ports being spaced from one another along an azimuthal path of said plenum; and said annular ceiling having respective peaks of maximum heights above said annular floor at respective ones of said injection ports and having nulls of minimum heights above said annular floor at respective midpoints along said azimuthal path between respective pairs of said injection ports, said ceiling having respective slopes from each peak toward respective ones of said nulls.
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21. A plasma reactor chamber comprising:
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a vacuum chamber; a support placed inside the vacuum chamber to hold a substrate; a gas distribution plate configured to allow an injection of a gas into the chamber, wherein the gas distribution plate further comprises a first hollow annular plenum within or supported by said plate, said annular plenum being concentric with an axis of symmetry of said plate, said plenum comprising an annular floor and an annular ceiling facing said annular floor; plural gas injection holes in said floor; a gas injection port coupled to said plenum at a supply end of said plenum; and said annular ceiling having a height above said annular floor, said height being maximum at said supply end of said plenum, said ceiling sloping toward said floor along an azimuthal path of said plenum whereby said height decreases along said azimuthal path.
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22. A plasma reactor chamber comprising:
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a vacuum chamber; a support placed inside the vacuum chamber to hold a substrate; a gas distribution plate configured to allow an injection of a gas into the chamber, wherein the gas distribution plate further comprises a disk-shaped plate; a hollow annular plenum within or supported by said disk-shaped plate, said annular plenum being concentric with an axis of symmetry of said disk-shaped plate, said plenum comprising an annular floor and an annular ceiling facing said annular floor; plural gas injection holes in said floor; plural gas injection ports coupled to said plenum, said injection ports being spaced from one another along an azimuthal path of said plenum; and said annular ceiling having respective peaks of maximum heights above said annular floor at respective ones of said injection ports and having nulls of minimum heights above said annular floor at respective midpoints along said azimuthal path between respective pairs of said injection ports, said ceiling having respective slopes from each peak toward respective ones of said nulls.
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Specification