HEATING APPARATUS
First Claim
Patent Images
1. A heating apparatus comprising:
- a base composed of a ceramic, and having a heating surface on which a substrate is set;
a heating body embedded in the base;
a heat conductive member provided between the heating surface of the base and the heating body and having a thermal conductivity higher than a thermal conductivity of the base; and
a temperature adjusting member provided proximal to a back surface of the base, whereina gap is provided between the base and the temperature adjusting member, and is connectable to a gas introduction apparatus which introduces a gas to the gap while adjusting a gas pressure in the gap.
1 Assignment
0 Petitions
Accused Products
Abstract
A heating apparatus 10 includes a ceramic base 11 having a heating surface 11a and provided with a resistance heating body 12 embedded therein, and a temperature adjusting member 21 fixedly fastened proximal to a back surface of the ceramic base 11. A heat conductive member 14 having a thermal conductivity higher than the ceramic base 11 is provided between the heating surface of the ceramic base 11 and the resistance heating body 12. A gas is introduced to an air gap 31 between the ceramic base 11 and the temperature adjusting member 21 while controlling the gas pressure.
-
Citations
15 Claims
-
1. A heating apparatus comprising:
-
a base composed of a ceramic, and having a heating surface on which a substrate is set; a heating body embedded in the base; a heat conductive member provided between the heating surface of the base and the heating body and having a thermal conductivity higher than a thermal conductivity of the base; and a temperature adjusting member provided proximal to a back surface of the base, wherein a gap is provided between the base and the temperature adjusting member, and is connectable to a gas introduction apparatus which introduces a gas to the gap while adjusting a gas pressure in the gap. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
Specification