×

HEATING APPARATUS

  • US 20090159588A1
  • Filed: 09/08/2008
  • Published: 06/25/2009
  • Est. Priority Date: 09/10/2007
  • Status: Abandoned Application
First Claim
Patent Images

1. A heating apparatus comprising:

  • a base composed of a ceramic, and having a heating surface on which a substrate is set;

    a heating body embedded in the base;

    a heat conductive member provided between the heating surface of the base and the heating body and having a thermal conductivity higher than a thermal conductivity of the base; and

    a temperature adjusting member provided proximal to a back surface of the base, whereina gap is provided between the base and the temperature adjusting member, and is connectable to a gas introduction apparatus which introduces a gas to the gap while adjusting a gas pressure in the gap.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×