Nitride semiconductor light emitting device and manufacturing method of the same
First Claim
1. A nitride semiconductor light emitting device comprising:
- a light emitting structure comprising n-type and p-type nitride semiconductor layers and an active layer disposed therebetween;
n- and p-electrodes electrically connected to the n-type and p-type nitride semiconductor layers, respectively; and
an n-type ohmic contact layer disposed between the n-type nitride semiconductor layer and the n-electrode and comprising a first layer and a second layer, the first layer formed of an In-containing material, and the second layer disposed on the first layer and formed of a transparent conductive oxide.
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Accused Products
Abstract
There is provided a nitride semiconductor light emitting device including: a light emitting structure including n-type and p-type nitride semiconductor layers and an active layer disposed therebetween; n- and p-electrodes electrically connected to the n-type and p-type nitride semiconductor layers, respectively; and an n-type ohmic contact layer disposed between the n-type nitride semiconductor layer and the n-electrode and including a first layer and a second layer, the first layer formed of an In-containing material, and the second layer disposed on the first layer and formed of a transparent conductive oxide. The nitride semiconductor light emitting device including the n-electrode exhibits high light transmittance and superior electrical characteristics. Further, the nitride semiconductor light emitting device can be manufactured by an optimal method to ensure superb optical and electrical characteristics.
13 Citations
12 Claims
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1. A nitride semiconductor light emitting device comprising:
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a light emitting structure comprising n-type and p-type nitride semiconductor layers and an active layer disposed therebetween; n- and p-electrodes electrically connected to the n-type and p-type nitride semiconductor layers, respectively; and an n-type ohmic contact layer disposed between the n-type nitride semiconductor layer and the n-electrode and comprising a first layer and a second layer, the first layer formed of an In-containing material, and the second layer disposed on the first layer and formed of a transparent conductive oxide. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of manufacturing a nitride light emitting device, the method comprising:
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depositing an n-type nitride semiconductor layer, an active layer and a p-type nitride semiconductor layer sequentially to form a light emitting structure; forming an n-type ohmic contact layer by forming a first layer made of an In-containing material on one surface of the n-type nitride semiconductor layer and a second layer made of a transparent conductive oxide on the first layer; forming an n-electrode on the n-type ohmic contact layer; and forming a p-electrode to electrically connect to the p-type nitride semiconductor layer. - View Dependent Claims (10, 11, 12)
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Specification