INDUCTOR AND MANUFACTURING METHOD THREOF
First Claim
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1. An inductor, comprising an inductor wiring made of a metal layer and having a spiral planar shape, wherein, in a cross-sectional shape in a width direction of the inductor wiring, the inductor wiring has a larger film thickness at least in its inner side end than in its middle part.
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Abstract
An inductor includes an inductor wiring made of a metal layer and having a spiral planar shape. In a cross-sectional shape in a width direction of the inductor wiring, the inductor wiring has a larger film thickness at least in its inner side end than in its middle part.
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Citations
7 Claims
- 1. An inductor, comprising an inductor wiring made of a metal layer and having a spiral planar shape, wherein, in a cross-sectional shape in a width direction of the inductor wiring, the inductor wiring has a larger film thickness at least in its inner side end than in its middle part.
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4. A method for manufacturing an inductor, comprising the steps of:
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(a) forming an insulating film on a semiconductor substrate; (b) forming a first groove having a spiral planar shape in the insulating film; (c) forming a first inductor pattern by embedding a first metal layer in the first groove; and (d) forming on the insulating film a second inductor pattern made of a second metal layer, extending along a top surface of the first inductor pattern, and having a larger width than that of the first inductor pattern, wherein in the step (d), an inductor wiring formed by the first inductor pattern and the second inductor pattern is formed by positioning an inner side end of the second inductor pattern on the first inductor pattern. - View Dependent Claims (5, 6, 7)
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Specification