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CHLORINE, FLUORINE AND LITHIUM CO-DOPED TRANSPARENT CONDUCTIVE FILMS AND METHODS FOR FABRICATING THE SAME

  • US 20090162697A1
  • Filed: 10/29/2008
  • Published: 06/25/2009
  • Est. Priority Date: 12/25/2007
  • Status: Active Grant
First Claim
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1. A chlorine, fluorine and lithium co-doped transparent conductive film, comprising:

  • chlorine, fluorine and lithium co-doped tin oxides, wherein the chlorine, fluorine and lithium co-doped tin oxides have a chlorine ion doping concentration not greater than 5 atom %, a fluorine ion doping concentration not greater than 5 atom %, and a lithium ion doping concentration not greater than 5 atom %.

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