CHLORINE, FLUORINE AND LITHIUM CO-DOPED TRANSPARENT CONDUCTIVE FILMS AND METHODS FOR FABRICATING THE SAME
First Claim
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1. A chlorine, fluorine and lithium co-doped transparent conductive film, comprising:
- chlorine, fluorine and lithium co-doped tin oxides, wherein the chlorine, fluorine and lithium co-doped tin oxides have a chlorine ion doping concentration not greater than 5 atom %, a fluorine ion doping concentration not greater than 5 atom %, and a lithium ion doping concentration not greater than 5 atom %.
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Abstract
A chlorine, fluorine and lithium co-doped transparent conductive film is provided, including chlorine, fluorine and lithium co-doped tin oxides, wherein the chlorine, fluorine and lithium co-doped tin oxides have a chlorine ion doping concentration not greater than 5 atom %, a fluorine ion doping concentration not greater than 5 atom %, and a lithium ion doping concentration not greater than 5 atom %.
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Citations
15 Claims
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1. A chlorine, fluorine and lithium co-doped transparent conductive film, comprising:
chlorine, fluorine and lithium co-doped tin oxides, wherein the chlorine, fluorine and lithium co-doped tin oxides have a chlorine ion doping concentration not greater than 5 atom %, a fluorine ion doping concentration not greater than 5 atom %, and a lithium ion doping concentration not greater than 5 atom %. - View Dependent Claims (2, 3, 4)
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5. A method for fabricating a chlorine, fluorine and lithium co-doped transparent conductive film, comprising:
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providing a substrate in a reaction chamber; and providing a reaction gas and an oxygen-containing gas into the reaction chamber at a reaction temperature of about 200-850°
C. and a normal pressure and transferring the reaction gas to the substrate by the oxygen-containing gas, thereby forming the chlorine, fluorine and lithium co-doped transparent conductive film over the substrate, wherein the reaction gas is a vaporized gas obtained by vaporizing a mixture comprising a tin chloride, a fluorine-containing compound, and a lithium-containing compound at the reaction temperature. - View Dependent Claims (6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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Specification