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REMOVAL OF SURFACE DOPANTS FROM A SUBSTRATE

  • US 20090162996A1
  • Filed: 12/21/2007
  • Published: 06/25/2009
  • Est. Priority Date: 12/21/2007
  • Status: Active Grant
First Claim
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1. A method of treating a substrate containing dopants, comprising:

  • disposing the substrate in one or more chambers;

    providing a dopant removal mixture to the one or more chambers;

    producing one or more volatile compounds in at least one of the chambers by applying the dopant removal mixture to the substrate; and

    removing the one or more volatile compounds from the one or more chambers.

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