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Susceptor with Support Bosses

  • US 20090165721A1
  • Filed: 12/27/2007
  • Published: 07/02/2009
  • Est. Priority Date: 12/27/2007
  • Status: Abandoned Application
First Claim
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1. A susceptor for supporting a semiconductor wafer during a chemical vapor deposition process in a chemical vapor deposition device that includes a plurality of support posts, the susceptor comprising:

  • a body having opposing upper and lower surfaces,at least one recess extending downward from the upper surface of the body for receiving a single semiconductor wafer therein during the chemical vapor deposition process,a plurality of support bosses extending downward from the lower face of the body, each of said support bosses having a boss opening, wherein the boss opening is sized and shaped for receiving a free end of one of the support posts of the chemical vapor deposition device to mount the susceptor on the support posts.

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