APPARATUS FOR TREATING SUBSTRATE

• US 20090165722A1
• Filed: 12/20/2008
• Published: 07/02/2009
• Est. Priority Date: 12/26/2007
• Status: Abandoned Application

• Current Assignee: Jusung Engineering Company Limited
• Original Assignee: Jusung Engineering Company Limited
• Inventors: HA, Heon-Sik
• Application Number:
  US12/340,669
• Publication Number:
  US 20090165722A1
• Time in Patent Office: Days
• US Class Current: 118/728
• CPC Class Codes: H01J 37/32091 the radio frequency energy being capacitively coupled to the plasma
• CPC Class Codes: H01J 37/3244 Gas supply means

Abstract

An apparatus for treating a substrate includes: a chamber including an upper lid; a rear plate in the chamber; a gas distributing plate under the rear plate, the gas distributing plate including a plurality of injection holes, the gas distributing plate combined with the upper lid using a plurality of first coupling means; and a substrate holder under the gas distributing plate, the substrate holder having the substrate thereon.

Claims

1. An apparatus for treating a substrate, comprising:

a chamber including all upper lid;

a rear plate in the chamber;

a gas distributing plate under the rear plate, the gas distributing plate including a plurality of in section holes, the gas distributing plate combined with the upper lid using a plurality of first coupling means; and

a substrate holder under the gas distributing plate, the substrate holder having the substrate thereon.

2. The apparatus according to claim 1, wherein a radio frequency power is applied to the rear plate and the substrate holder such that a plasma is generated in the chamber.

3. The apparatus according to claim 1, wherein the plurality of first coupling means include a plurality of first screws and a plurality of screw holes in the gas distributing plate.

4. The apparatus according to claim 3 wherein the upper lid includes a plurality of first through holes and the rear plate includes a plurality of second through holes, and wherein the plurality of first screws are combined with the plurality of screw holes through the plurality of first through holes and the plurality of second through holes.

5. The apparatus according to claim 4, further comprising a screw cap over each of the plurality of first screws and a bellows between the upper lid and the rear plate for hermetic sealing, wherein the bellows surrounds each of the plurality of first screws.

6. The apparatus according to claim 5, further comprising First, second, third and fourth insulating means for insulating the upper lid from the gas distributing plate, wherein the first insulating means is formed in each of the plurality of first through holes, the second insulating means is formed between each of the plurality of first screws and a front surface of the upper lid, the third insulating means is formed between a rear surface of the upper lid and the bellows, and the fourth insulating means is formed between the bellows and the rear plate.

7. The apparatus according to claim 6, wherein the second insulating means has a circular plate shape having an opening and is combined with the upper lid using a plurality of second coupling means.

8. The apparatus according to claim 5, wherein the upper lid includes a plurality of insertion holes and upper portions of the plurality of first screws are inserted into the plurality of insertion holes.

9. The apparatus according to claim 8, further comprising a first flange between the upper lid and the bellows and a second flange between the bellows and the rear plate.

10. The apparatus according to claim 9, further comprising first, second, third and fourth insulating means for insulating the upper lid from the gas distributing plate, wherein the first insulating means is formed on the tipper portion of each of the plurality of first screw in each of the plurality of insertion holes, the second insulating means is formed in an upper portion of each of the plurality of first through holes, the third insulating means is formed in a lower portion of each of the plurality of first through holes, and the fourth insulating means is formed between the second flange and the rear plate.

11. The apparatus according to claim 9, wherein the first insulating means includes a first step portion at a lower circumference portion thereof, the second insulating means includes a second step portion at an upper circumference portion thereof and a third step portion at a lower circumference portion thereof and the third insulating means 204 includes a fourth step portion 216 at an upper circumference portion thereof, and wherein the first step portion is inserted into the second step portion and the third step portion is inserted into the fourth step portion.

12. The apparatus according to claim 3, wherein each of the plurality of first screws includes a first screw thread on an outer surface of a lower portion thereof, and each of the plurality of screw holes includes a second screw thread on an inner surface thereof.

13. The apparatus according to claim 12, wherein a distance between the upper lid and the gas distributing plate is controllable by a coupling degree of the plurality of first screws and the plurality of screw holes.

14. The apparatus according to claim 3, further comprising a baffle between the rear plate and the gas distributing plate, wherein the baffle includes a plurality of third through holes for the plurality of first screws.

15. The apparatus according to claim 1, further comprising a gas inlet connected to the rear plate, a gas outlet connected the chamber, a matcher connected to the rear plate and a radio frequency power supply connected to the matcher.