SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
First Claim
1. A semiconductor device, comprising:
- a semiconductor substrate;
a diode having a cathode formed on a first surface side of the semiconductor substrate and an anode formed on a second surface side of the semiconductor substrate; and
a transistor formed over the semiconductor substrate, whereinthe transistor includes a semiconductor layer laminate including a first nitride semiconductor layer and a second nitride semiconductor layer that are formed sequentially from the semiconductor substrate side, the second nitride semiconductor layer has a wider bandgap than that of the first nitride semiconductor layer, the transistor further includes a source electrode and a drain electrode that are formed spaced apart from each other over the semiconductor layer laminate, and a gate electrode formed between the source electrode and the drain electrode, the source electrode is electrically connected to the anode, and the drain electrode is electrically connected to the cathode.
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Accused Products
Abstract
A semiconductor device includes: a semiconductor substrate; a diode having a cathode formed on a first surface side of the semiconductor substrate and an anode formed on a second surface side of the semiconductor substrate; and a transistor formed over the semiconductor substrate. The transistor includes a semiconductor layer laminate formed over the semiconductor substrate, a source electrode and a drain electrode that are formed spaced apart from each other over the semiconductor layer laminate, and a gate electrode formed between the source electrode and the drain electrode. The source electrode is electrically connected to the anode, and the drain electrode is electrically connected to the cathode.
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Citations
20 Claims
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1. A semiconductor device, comprising:
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a semiconductor substrate; a diode having a cathode formed on a first surface side of the semiconductor substrate and an anode formed on a second surface side of the semiconductor substrate; and a transistor formed over the semiconductor substrate, wherein the transistor includes a semiconductor layer laminate including a first nitride semiconductor layer and a second nitride semiconductor layer that are formed sequentially from the semiconductor substrate side, the second nitride semiconductor layer has a wider bandgap than that of the first nitride semiconductor layer, the transistor further includes a source electrode and a drain electrode that are formed spaced apart from each other over the semiconductor layer laminate, and a gate electrode formed between the source electrode and the drain electrode, the source electrode is electrically connected to the anode, and the drain electrode is electrically connected to the cathode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 13)
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12. A semiconductor device, comprising:
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a semiconductor layer laminate including a first nitride semiconductor layer formed over a substrate and a second nitride semiconductor layer formed on the first nitride semiconductor layer and having a wider bandgap than that of the first nitride semiconductor layer; a cathode electrode, a source electrode, and a drain electrode that are formed spaced apart from each other over the semiconductor layer laminate; a gate electrode formed between the source electrode and the drain electrode; a first p-type semiconductor layer formed between the cathode electrode and the source electrode; and an anode electrode formed on the first p-type semiconductor layer, wherein the source electrode and the anode electrode are electrically connected to each other, and the drain electrode and the cathode electrode are electrically connected to each other.
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14. A method for manufacturing a semiconductor device, comprising the steps of:
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(a) preparing a semiconductor substrate having on a first surface side thereof an n-type region that will serve as a cathode of a diode, and having a diffusion prevention layer between the n-type region and the first surface; (b) forming an anode of the diode on a second surface side of the semiconductor substrate; (c) forming over the first surface of the semiconductor substrate a nitride transistor having a channel region in which electrons travel in a direction parallel to the first surface and having a source electrode, a drain electrode, and a gate electrode; and (d) forming a drain via plug electrically connecting the drain electrode and the n-type region to each other; and (e) electrically connecting the source electrode and the anode to each other. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification