LIQUID DISCHARGE HEAD AND METHOD OF MANUFACTURING THE SAME

• US 20090167812A1
• Filed: 08/20/2007
• Published: 07/02/2009
• Est. Priority Date: 09/08/2006
• Status: Active Grant

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Asai, Kazuhiro, Kubota, Masahiko, Suzuki, Takumi, Sato, Tamaki, Kato, Maki
• Granted Patent: US 8,376,525 B2
• Time in Patent Office: Days
• US Class Current: 347/20
• CPC Class Codes: B41J 2/1404 Geometrical characteristics
• CPC Class Codes: B41J 2/1603 of the front shooter type
• CPC Class Codes: B41J 2/1629 wet etching
• CPC Class Codes: B41J 2/1631 photolithography
• CPC Class Codes: B41J 2/1639 sacrificial molding
• CPC Class Codes: B41J 2/1645 thin film formation by spincoating
• CPC Class Codes: Y10T 29/49401 Fluid pattern dispersing device making, e.g., ink jet

Abstract

Provided is a method of manufacturing a liquid discharge head including: forming a first pattern for forming the flow path on the substrate; forming a first coating layer which covers the first pattern; forming a hole in the first coating layer, through which the first pattern is exposed; forming a second pattern for forming the flow path on the first coating layer, such that the second pattern contacts with the first pattern through the hole; forming a second coating layer for covering the second pattern; forming the discharge port in the second coating layer; and removing the first pattern and the second pattern to form the flow path.

Claims

1. A method of manufacturing a liquid discharge head comprising a discharge port for discharging a liquid, and a flow path forming member forming a liquid flow path communicating with the discharge port, the method of manufacturing a liquid discharge head comprising:

providing a first pattern of a part of the flow path on a substrate;

providing a first coating layer becoming the flow path forming member, the first coating layer covering the first pattern;

removing a plurality of parts of the first coating layer so that a plurality of parts are partially exposed in the first pattern corresponding to the flow path;

providing a second pattern of a part of the flow path on the first coating layer, such that the second pattern contacts with the first pattern at a portion where a plurality of parts of the first pattern are exposed;

providing a second coating layer becoming the flow path forming member, for covering the second pattern; and

removing the first pattern and the second pattern to form the flow path.

3. A method of manufacturing a liquid discharge head according to claim 1, wherein

the first coating layer and the second coating layer each comprise a negative photosensitive resin layer, and

the first pattern and the second pattern are each formed of a positive photosensitive resin.

4. A method of manufacturing a liquid discharge head according to claim 3, wherein the positive photosensitive resin forming the first pattern and the positive photosensitive resin forming the second pattern are exposed to light different in wavelength.

5. A method of manufacturing a liquid discharge head according to claim 4, wherein the positive photosensitive resin forming the first pattern is exposed to light mainly having a wavelength equal to or larger than 260 nm and the positive photosensitive resin forming the second pattern is exposed to light mainly having a wavelength less than 260 nm.

6. A method of manufacturing a liquid discharge head according to claim 5, wherein

the positive photosensitive resin forming the first pattern is mainly composed of polymethyl isopropenyl ketone, and

the positive photosensitive resin forming the second pattern comprises a copolymer of methacrylic acid methyl as a main component and one of methacrylic acid and methacrylic acid anhydride.

2. (canceled)

7. A liquid discharge head, comprising:

a substrate having first and second elements for generating energy to be used for discharging a liquid;

first and second discharge ports for discharging the liquid, the first and second discharge ports being provided in correspondence with the first and second elements;

a supply opening for supplying a liquid to be discharged;

first and second discharge portions communicating with the first and second discharge ports; and

first and second flow paths for communicating the first and second discharge portions with the supply opening,

wherein the second discharge port is provided relatively far from the supply opening and the first discharge port is provided relatively close to the supply port, and the second flow path communicating with the second discharge port at least partially overlaps the first discharge portion, when viewed in a direction from the first and second discharge ports to the substrate.

8. A liquid discharge head according to claim 7, further comprising two first discharge portions corresponding to two adjacent first discharge ports provided relatively close to the supply opening,

wherein the two first discharge portions are provided on either side of the second flow path corresponding to the second discharge port provided relatively far from the supply opening.

9. A liquid discharge head according to claim 7, wherein the first flow path corresponding to the first discharge port provided relatively close to the supply opening is arranged at a position closer to the substrate than the second flow path corresponding to the second discharge port provided relatively far from the supply opening.

10. A liquid discharge head according to claim 7, wherein the second flow path corresponding to the second discharge port provided relatively far from the supply opening is arranged so as to overlap with the first flow path corresponding to the first discharge port provided relatively close to the supply opening, when viewed in the direction from the first and second discharge ports to the substrate.

11. A liquid discharge head comprising:

a substrate having an element for generating energy to be used to discharge a liquid;

a discharge port for discharging a liquid, the discharge port being provided at a position opposed to said element;

a supply opening for supplying the liquid to be discharged;

a discharge portion communicating with said discharge port; and

a flow path forming member for forming a flow path by which said discharge portion is communicated with said supply opening,

wherein said flow path includes a first flow path and a second flow path,

wherein with respect to a direction toward said substrate from said discharge port, said first flow path and said second flow path are overlapped with each other at least between said supply opening and said discharge portion through said flow path forming member, and said first flow path is closer to said substrate than said second flow path is to said substrate.

12. A liquid discharge head according to claim 11, wherein said discharge portion comprises first and second discharge portions, said first discharge portion has a different cross-sectional area parallel to said substrate than that of said second discharge portion, said first discharge portion is relatively closer to said substrate and said second discharge portion is relatively far from said substrate, and said first flow path communicates with said first discharge portion and said second flow path communicates with said second discharge portion.

13. A liquid discharge head according to claim 11, wherein a plurality of pairs of said energy generating element and said discharge portion corresponding to said energy generating element are formed in a row, and said second flow path communicates with both of adjacent discharge portions.