THREE-DIMENSIONAL MEMORY DEVICE
First Claim
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1. A three-dimensional memory device comprising:
- a base layer comprising a memory array and peripheral circuits formed on a bulk silicon substrate; and
N circuit layers, where N is a positive integer, each comprising a memory array formed on a silicon-on-insulator (SOI) substrate,wherein the N circuit layers are vertically stacked one on top of the other on the base layer and the uppermost Nth circuit layer additionally comprises passive elements.
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Abstract
A three-dimensional memory device includes a base layer having a memory array and peripheral circuits formed on a bulk silicon substrate, and N circuit layers each having a memory array formed on a silicon-on-insulator (SOI) substrate. The N circuit layers are vertically stacked one on top of the other on the base layer and the uppermost Nth circuit layer additionally includes passive elements
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Citations
19 Claims
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1. A three-dimensional memory device comprising:
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a base layer comprising a memory array and peripheral circuits formed on a bulk silicon substrate; and N circuit layers, where N is a positive integer, each comprising a memory array formed on a silicon-on-insulator (SOI) substrate, wherein the N circuit layers are vertically stacked one on top of the other on the base layer and the uppermost Nth circuit layer additionally comprises passive elements. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A three-dimensional memory device comprising:
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a base layer comprising a memory array and passive circuits formed on a bulk silicon substrate; and N circuit layers, where N is a positive integer, each comprising a memory array formed on a silicon-on-insulator (SOI) substrate, wherein the N circuit layers are vertically stacked one on top of the other on the base layer and the uppermost Nth circuit layer additionally comprises peripheral circuits. - View Dependent Claims (8, 9, 10, 11, 12, 18, 19)
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13. A three-dimensional memory device comprising:
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a base layer comprising a memory array, first peripheral circuits, and first passive elements formed on a bulk silicon substrate; and N circuit layers, where N is a positive integer, each comprising a memory array formed on a silicon-on-insulator (SOI) substrate, wherein the N circuit layers are vertically stacked one on top of the other on the base layer and the uppermost Nth circuit layer additionally comprises second peripheral circuits and second passive elements. - View Dependent Claims (14, 15, 16, 17)
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Specification