CONTROLLED FLUID DELIVERY IN A MICROELECTRONIC PACKAGE
First Claim
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1. An apparatus, comprising:
- a substrate having a die positioned thereon for processing fluids;
a coating patterned on the substrate defining a fluid flow path;
a cover fit over the substrate;
a coating patterned on the cover corresponding to the coating patterned on the substrate; and
a spacer between the substrate and the cover, wherein the fluid flow path defines a path for carrying the fluids to the die.
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Abstract
A microelectronic package includes a die which may include MEMS and CMOS circuitry for analyzing a fluid. A defined path is provided for channeling fluid to the die. Rather than patterning depressions or physical channels in the package substrate, the defined paths comprise coatings that may channel the flow of liquids to the die for biological sensor type applications. The defined paths may comprise a wetting coating that has an affinity to fluids. Similarly, the defined paths may comprise a dewetting coating the tend to repel fluid surrounding the paths.
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Citations
20 Claims
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1. An apparatus, comprising:
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a substrate having a die positioned thereon for processing fluids; a coating patterned on the substrate defining a fluid flow path; a cover fit over the substrate; a coating patterned on the cover corresponding to the coating patterned on the substrate; and a spacer between the substrate and the cover, wherein the fluid flow path defines a path for carrying the fluids to the die. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for forming virtual fluidic channels on a substrate to channel a fluid to a die, comprising:
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providing a die on a substrate, the die including one or more fluidic circuits; patterning a coating on the substrate to define a fluid path from an edge of the substrate to the die; patterning a coating on a cover corresponding to the fluid flow path; positioning a spacer on the substrate; and placing the cover over the substrate and the spacer, wherein the coatings define a virtual fluidic path to channel a fluid to the die. - View Dependent Claims (13, 14, 15, 16, 17)
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18. A system comprising:
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a substrate having a die positioned thereon including CMOS and MEMS circuits for processing biological fluids; a cover over the substrate; and a virtual fluid path comprising one of a wetting or dewetting coating patterned on the substrate and the cover for channeling the biological fluids from an inlet on an edge of the substrate to the die. - View Dependent Claims (19, 20)
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Specification