SYSTEM AND METHOD FOR PERFORMANCE BASED PRODUCTION SCHEDULING AND DISPATCHING
First Claim
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1. An execution control system, comprising:
- a scheduling system configured to mathematically optimize one or more processes to be performed by the execution control system;
a process control system configured to control processes to be performed by the system;
model constraints information corresponding to physical limitations of the processes to be performed by the system; and
a mechanism configured to implement guidance in process scheduling related to the scheduling system and the model constraints.
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Abstract
Execution control systems for optimizing the efficiency of manufacturing processes are described in this application. For example, an execution management system may optimize IC processes and scheduling by analyzing a number of desired metrics along with system constraints, such as tool availability, tool reliability, etc, along with information from conventional processing tools such as APC and SPC. The optimized processing schedule may then be implemented in real-time and updated with new process requests and current information relating to tools and other metrics, thereby reducing human interaction and inefficiency. Other embodiments are also described in this application.
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15 Claims
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1. An execution control system, comprising:
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a scheduling system configured to mathematically optimize one or more processes to be performed by the execution control system; a process control system configured to control processes to be performed by the system; model constraints information corresponding to physical limitations of the processes to be performed by the system; and a mechanism configured to implement guidance in process scheduling related to the scheduling system and the model constraints. - View Dependent Claims (2, 3, 4, 5, 6, 7, 12, 13, 14, 15)
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8. A method of controlling manufacturing processes, including:
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mathematically optimizing each of a plurality of processes to be performed; providing model constraints information corresponding to physical limitations of processes to be controlled; and developing guidance configured to increase efficiency by scheduling the plurality of processes based on the mathematically optimizing and the model constraints information; implementing the guidance in process scheduling of the plurality of processes to be performed. - View Dependent Claims (9, 10, 11)
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Specification