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METHOD OF FORMING A CARBON NANOTUBE-BASED CONTACT TO SEMICONDUCTOR

  • US 20090173964A1
  • Filed: 02/21/2007
  • Published: 07/09/2009
  • Est. Priority Date: 07/25/2001
  • Status: Active Grant
First Claim
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1. A conductive article comprising:

  • a semiconductor material substrate;

    a patterned conductive trace disposed on the semiconductor material substrate wherein the trace includes;

    a non-woven nanotube fabric layer comprising a plurality ofunaligned nanotubes providing a plurality of conductive pathways along the extent of the trace, anda metal layer adjacent to the non-woven nanotube fabric layer.

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