HIGH TEMPERATURE VACUUM CHUCK ASSEMBLY
First Claim
1. A vacuum chuck assembly, comprising:
- a support body having a support surface for holding a substrate thereon;
at least one support member supporting the support body; and
at least one resilient member coupled with the at least one support member.
1 Assignment
0 Petitions
Accused Products
Abstract
A vacuum chuck and a process chamber equipped with the same are provided. The vacuum chuck assembly comprises a support body, a plurality of protrusions, a plurality of channels, at least one support member supporting the support body, at least one resilient member coupled with the support member, a hollow shaft supporting the support body, at least one electrical connector disposed through the hollow shaft, and an air-cooling apparatus. The support body has a support surface for holding a substrate (such as a wafer) thereon. The protrusions are formed on and project from the support surface for creating a gap between the substrate and the support surface. The channels are formed on the support surface for generating reduced pressure in the gap. The air-cooling apparatus is used for providing air cooling in the vicinity of the electrical connector.
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Citations
20 Claims
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1. A vacuum chuck assembly, comprising:
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a support body having a support surface for holding a substrate thereon; at least one support member supporting the support body; and at least one resilient member coupled with the at least one support member. - View Dependent Claims (2, 3, 4, 5)
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6. A vacuum chuck assembly, comprising:
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a support body having a support surface for holding a substrate thereon; a plurality of protrusions formed on the support surface, the protrusions projecting from the support surface for creating a gap between the substrate and the support surface; and a plurality of channels formed on the support surface for generating reduced pressure in the gap. - View Dependent Claims (7, 8, 9, 10, 11, 12)
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13. A process chamber, comprising:
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a chamber mount; a support body having a support surface for holding a substrate thereon; a plurality of protrusions formed on the support surface, the protrusions projecting from the support surface for creating a gap between the substrate and the support surface, wherein each of the protrusions has a planarized top surface for contacting the substrate; a plurality of channels formed on the support surface for generating reduced pressure in the gap; at least one support member supporting the support body; and at least one resilient member coupled between the chamber mount and the at least one support member. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification