SELF-ACTIVATED NANOSCALE PIEZOELECTRIC MOTION SENSOR

• US 20090179523A1
• Filed: 03/27/2009
• Published: 07/16/2009
• Est. Priority Date: 06/08/2007
• Status: Abandoned Application

• Current Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Original Assignee: Georgia Tech Research Corporation (University System of Georgia)
• Inventors: Jun, Zhou, Wang, Zhong L.
• Application Number:
  US12/413,470
• Publication Number:
  US 20090179523A1
• Time in Patent Office: Days
• US Class Current: 310/338
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: G01L 1/044 of leaf springs
• CPC Class Codes: G01L 1/16 using properties of piezoelectric devices
• CPC Class Codes: G06V 10/94 Hardware or software architectures specially adapted for image or video understanding
• CPC Class Codes: H10N 30/01 Manufacture or treatment
• CPC Class Codes: H10N 30/073 by fusion of metals or by adhesives
• CPC Class Codes: H10N 30/302 Sensors
• CPC Class Codes: Y10T 29/42 Piezoelectric device making

Abstract

A strain sensor for measuring strain in a surface of an object includes an insulating flexible substrate, a first conductive contact, a second conductive contact and a piezoelectric nanowire. The insulating flexible substrate is coupled to the object. The first conductive contact and the second conductive contact are mounted on the insulating substrate. The piezoelectric nanowire is electrically coupled to the first conductive contact and the second conductive contact. The piezoelectric nanowire is subject to strain when the surface of the object is subject to strain, thereby creating a voltage differential therebetween. A trigger sensor includes a substrate, a piezoelectric nanowire and a conductive contact. The piezoelectric nanowire extends from the substrate. The conductive contact is disposed in relation to the piezoelectric nanowire so that a voltage differential between the substrate and the conductive contact when the substrate moves with the predetermined acceleration.

Claims

1. A strain sensor for measuring strain in a surface of an object, comprising:

a. an insulating flexible substrate configured to be physically coupled to the object;

b. a first conductive contact mounted on the insulating substrate;

c. a second conductive contact mounted on the insulating substrate and spaced apart from the first conductive contact; and

d. a piezoelectric nanowire disposed adjacent to the insulating substrate and electrically coupled to both the first conductive contact and to the second conductive contact, wherein a Schottky barrier exists between the piezoelectric nanowire and the second conductive contact, wherein the piezoelectric nanowire is subject to strain when the surface of the object is subject to strain, thereby creating a voltage differential between the first conductive contact and the second conductive contact.

2. The strain sensor of claim 1, further comprising a voltage sensor that is configured to sense the voltage differential between the first conductive contact and the second conductive contact, the voltage differential being indicative of an amount of strain to which the surface of the object is subjected.

3. The strain sensor of claim 1, further comprising a protective packaging disposed about the flexible substrate, the first conductive contact, the first conductive contact and the piezoelectric nanowire.

4. The strain sensor of claim 3, wherein the protective packaging comprises polydimethylsiloxane.

5. The strain sensor of claim 1, wherein the piezoelectric nanowire comprises zinc oxide.

6. The strain sensor of claim 1, wherein the flexible substrate comprises a flexible polymer.

7. A method of making a strain sensor, comprising the actions of:

a. placing a piezoelectric nanowire on a flexible substrate;

b. placing a conductive substance on a first portion of the piezoelectric nanowire so as to form a first conductive contact; and

c. placing the conductive substance on a second portion of the piezoelectric nanowire, spaced apart from the first portion of the piezoelectric nanowire so as to form a second conductive contact.

8. The method of claim 7, further comprising the action of electrically coupling an electrical sensor to the first conductive contact and the second conductive contact.

9. The method of claim 7, wherein the piezoelectric nanowire comprises zinc oxide.

10. The method of claim 7, wherein the flexible substrate comprises a flexible polymer.

11. The method of claim 7, wherein the conductive substance comprises a material selected from a group consisting of:

a metal paste, a silver paste, a conductive epoxy and a metal contact.

12. The method of claim 7, further comprising the action of applying a protective packaging to the flexible substrate, the first conductive contact, the first conductive contact and the piezoelectric nanowire.

13. The method of claim 12, wherein the protective packaging comprises polydimethylsiloxane.

14. A trigger sensor, comprising:

a. a substrate;

b. a piezoelectric nanowire extending from the substrate;

c. a conductive contact disposed in relation to the piezoelectric nanowire so that a

Schottky barrier forms between the piezoelectric nanowire and the conductive contact when a the conductive substrate moves with a predetermined acceleration and so that a voltage differential between the substrate and the conductive contact when the substrate moves with the predetermined acceleration.

15. The trigger sensor of claim 14, wherein the piezoelectric nanowire comprises zinc oxide.

16. The trigger sensor of claim 14, wherein the substrate comprises an insulating substrate.

17. The trigger sensor of claim 14, wherein the conductive contact comprises a conductive needle.

18. The trigger sensor of claim 17, wherein the conductive needle comprises tungsten coated with a metal.

19. The trigger sensor of claim 14, further comprising a circuit configured to measure an electrical characteristic between a first portion of the piezoelectric nanowire and a spaced apart second portion of the piezoelectric nanowire.