Microfluidic Structures for Biomedical Applications
First Claim
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1. A method for fabricating a microfluidic structure, comprising:
- (a) providing a patterned wafer comprising at least one exposed electrically conductive region and at least one exposed electrically insulating region;
(b) electroplating an inverse channel portion with substantially semicircular cross section onto the wafer, thereby forming a first master mold;
(c) employing the first master mold so as to emboss a channel portion in a first polymer sheet;
(d) aligning and bonding the first polymer sheet with a second polymer sheet having a corresponding channel portion such as to define a first channel with substantially circular cross section between the polymer sheets.
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Abstract
Microfluidic structures featuring substantially circular channels may be fabricated by embossing polymer sheets.
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Citations
30 Claims
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1. A method for fabricating a microfluidic structure, comprising:
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(a) providing a patterned wafer comprising at least one exposed electrically conductive region and at least one exposed electrically insulating region; (b) electroplating an inverse channel portion with substantially semicircular cross section onto the wafer, thereby forming a first master mold; (c) employing the first master mold so as to emboss a channel portion in a first polymer sheet; (d) aligning and bonding the first polymer sheet with a second polymer sheet having a corresponding channel portion such as to define a first channel with substantially circular cross section between the polymer sheets. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A microfluidic structure, comprising:
a polymer scaffold defining a first channel therein, at least a portion of the first channel being characterized by a substantially circular cross section and a diameter less than 300 micrometers. - View Dependent Claims (20, 21, 22, 23, 24)
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25. A microfluidic device, comprising:
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(a) a plurality of microfluidic structures, each structure comprising a polymer scaffold defining at least one channel therein, the plurality of microfluidic structures being stacked so as to form a stacked microfluidic structure that defines a front surface comprising outlets of the channels; and (b) a microfluidic header comprising at least one polymer scaffold that defines a network of channels therein, the microfluidic header being coupled to the front surface of the stacked microfluidic structure and aligned with the outlets of the channels so as to fluidically couple the microfluidic structures together. - View Dependent Claims (26, 27, 28)
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29. A method for fabricating a microfluidic structure, comprising:
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(a) providing a patterned wafer; (b) isotropically etching the wafer with xenon difluoride so as to form a master mold defining an inverse channel portion with substantially semicircular cross section; (c) embossing the master mold into a transfer mold; (d) embossing the transfer mold into a first polymer sheet; and (e) aligning and bonding the first polymer sheet and a second polymer sheet having a corresponding channel portion such as to define a first channel with substantially circular cross section between the polymer sheets. - View Dependent Claims (30)
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Specification