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SEMICONDUCTOR LIGHT EMITTING DEVICE AND METHOD OF MANUFACTURING THE SAME

  • US 20090181484A1
  • Filed: 03/19/2009
  • Published: 07/16/2009
  • Est. Priority Date: 12/08/2004
  • Status: Active Grant
First Claim
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1. A method of manufacturing a semiconductor light emitting device having a nano pattern, the method comprising:

  • (a) forming a first semiconductor layer on a substrate;

    (b) forming an uneven structure by patterning the first semiconductor layer;

    (c) forming a nano pattern by filling the uneven structure of the first semiconductor layer with light-transmissive material; and

    (d) sequentially forming a second semiconductor layer, an active layer, and a third semiconductor layer on the first semiconductor layer.

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