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INERTIAL SENSOR

  • US 20090183568A1
  • Filed: 12/23/2008
  • Published: 07/23/2009
  • Est. Priority Date: 01/21/2008
  • Status: Active Grant
First Claim
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1. An inertial sensor comprising:

  • (a) an angular rate sensor which detects an angular rate; and

    (b) an acceleration sensor which detects acceleration, whereinthe angular rate sensor includes;

    (a1) a first peripheral portion formed on a first semiconductor substrate;

    (a2) a first cavity portion formed in the interior of the first peripheral portion;

    (a3) a first fixing portion formed in the interior of the first cavity portion;

    (a4) a vibrating body formed in the interior of the first cavity portion;

    (a5) a first elastic deforming portion which is elastically deformable and connects the first fixing portion and the vibrating body;

    (a6) a Coriolis frame formed in the interior of the vibrating body; and

    (a7) a second elastic deforming portion which is elastically deformable and connects the vibrating body and the Coriolis frame, whereinthe acceleration sensor includes;

    (b1) a second peripheral portion formed on a second semiconductor substrate;

    (b2) a second cavity portion formed in the interior of the second peripheral portion;

    (b3) a second fixing portion formed in the interior of the second cavity portion;

    (b4) a movable body formed in the interior of the cavity portion; and

    (b5) a third elastic deforming portion which is elastically deformable and connects the second fixing portion and the movable body, and whereinthe first cavity portion and the second cavity portion are inertial sensors set at a same pressure, and the movable body of the acceleration sensor is provided with a first shift suppressing portion which suppresses shifts with respect to an acceleration.

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