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Micromachined cross-differential dual-axis accelerometer

  • US 20090183570A1
  • Filed: 01/18/2008
  • Published: 07/23/2009
  • Est. Priority Date: 01/18/2008
  • Status: Abandoned Application
First Claim
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1. A micromachined accelerometer for sensing acceleration along first and second axes, comprising:

  • at least one proof mass and one frame suspended above a substrate in a manner permitting movement of each proof mass relative to the substrate along the first axis in response to acceleration along the first axis and also permitting torsional movement of each proof mass relative to the substrate about a third axis perpendicular to the first and second axes in response to acceleration along the second axis, detection electrodes that move with each proof mass relative to stationary electrodes to form a plurality of capacitors each of which changes in capacitance both in response to movement of a proof mass along the first axis and in response to torsional movement of a proof mass about the third axis, and circuitry connected to the electrodes for providing output signals corresponding to acceleration along the first and second axes.

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