ACCELERATION SENSOR
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Accused Products
Abstract
An acceleration sensor includes a base having an XY-substrate surface which is parallel to an XY plane, a beam portion having a frame shape which is arranged in a floating state above the XY-substrate surface of the base, a beam-supporting fixed portion which supports the beam on the base via supporting units like a beam supported by its both ends, weight portions 7 which are arranged so as to float above the XY-substrate surface of the base, and connecting portions which support the weight portions 7 to the beam portion in a cantilever manner. The weight portions are displaceable in the X-axis direction, the Y-axis direction, and the Z-axis direction by the bending deformation of the frame-shaped beam portion. The beam portion is provided with an X-axis direction acceleration detecting portion, a Y-axis direction acceleration detecting portion, and a Z-axis direction acceleration detecting portion.
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Citations
50 Claims
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1-25. -25. (canceled)
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26. :
- An acceleration sensor, comprising;
a base having an XY-substrate surface substantially parallel to an XY flat surface and including an X-axis, a Y-axis, and a Z-axis, all of which being perpendicular to one another; a beam portion having a frame shape arranged in a floating state above the XY-substrate surface of the base; a beam supporting fixed portion arranged to support the beam portion on the base via supporting portions having an elongated shape disposed on both sides of the beam portion, each facing outwards along the X-axis direction; a connecting portion having an elongated shape facing outwards along the Y-axis direction from each of two sides of the Y-axis direction of the beam portion in a state of floating above the XY-substrate surface of the base; and a weight portion connected to a tip portion of each connection portion;
whereinthe weight portion is arranged to be displaced in each of the X-axis direction, the Y-axis direction, and the Z-axis direction by bending deformation of the frame-shaped beam portion; and the beam portion comprises an X-axis direction acceleration detecting portion arranged to detect acceleration in the X-axis direction based on the bending deformation of the beam portion originating in the X-axis direction displacement of the weight portion, a Y-axis direction acceleration detecting portion arranged to detect acceleration in the Y-axis direction based on the bending deformation of the beam portion originating in the Y-axis direction displacement of the weight portion, and a Z-axis direction acceleration detecting portion arranged to detect acceleration in the Z-axis direction based on the bending deformation of the beam portion originating in the Z-axis direction displacement of the weight portion. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50)
- An acceleration sensor, comprising;
Specification