OPTICAL UNIT, ILLUMINATION OPTICAL APPARATUS, EXPOSURE APPARTUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
First Claim
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1. An optical unit comprising:
- a first optical path in which a spatial light modulator with a plurality of optical elements arranged two-dimensionally and controlled individually can be arranged;
a second optical path including a mechanism for insertion of an angle distribution providing element including a predetermined fixed pattern on a surface thereof; and
a third optical path being an optical path of light having traveled through both of the first optical path and the second optical path,wherein when the angle distribution providing element is inserted in the second optical path, an angle distribution is provided to light exited based on light incident to the angle distribution providing element.
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Abstract
An optical unit comprises a first optical path in which a spatial light modulator with a plurality of optical elements arranged two-dimensionally and controlled individually can be arranged; a second optical path including a mechanism for insertion of an angle distribution providing element including a predetermined fixed pattern on a surface thereof; and a third optical path being an optical path of light having traveled through both of the first optical path and the second optical path. When the angle distribution providing element is inserted in the second optical path, an angle distribution is provided to light exited based on light incident to the angle distribution providing element.
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20 Claims
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1. An optical unit comprising:
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a first optical path in which a spatial light modulator with a plurality of optical elements arranged two-dimensionally and controlled individually can be arranged; a second optical path including a mechanism for insertion of an angle distribution providing element including a predetermined fixed pattern on a surface thereof; and a third optical path being an optical path of light having traveled through both of the first optical path and the second optical path, wherein when the angle distribution providing element is inserted in the second optical path, an angle distribution is provided to light exited based on light incident to the angle distribution providing element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. An exposure method of effecting exposure of a predetermined pattern on a photosensitive substrate on the basis of light from a light source, the exposure method comprising:
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guiding the light from the light source to an angle distribution providing element to form a predetermined pupil intensity distribution on an illumination pupil; splitting the light from the light source into a first beam and a second beam different from the first beam, the second beam being directed toward the angle distribution providing element; guiding the first beam to a spatial light modulator with a plurality of optical elements arranged two-dimensionally and controlled individually; guiding the first beam having traveled via the spatial light modulator, to a position of the illumination pupil; illuminating the predetermined pattern with light having traveled via the illumination pupil; and performing the exposure on the photosensitive substrate on the basis of light from the predetermined pattern thus illuminated. - View Dependent Claims (18, 19, 20)
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Specification