Method of Manufacturing a Coil Inductor
First Claim
1. A method of manufacturing a conductive coil inductor, wherein the conductive coil inductor is a solenoid, the method comprises the steps of:
- forming a plurality of conductive bottom structures lying on a first dielectric layer;
forming a plurality pairs of conductive side structures, wherein each pair of the conductive side structure stand on top surface of a first end and a second end of each conductive bottom structure respectively;
forming a second dielectric layer on the first dielectric layer, coating the bottom and side structures; and
forming a plurality of conductive top structures lying on the second dielectric layer, wherein each conductive top structure electrically connects each pair of the conductive side structures, wherein the conductive bottom structures, the conductive side structures and the conductive top structures together form a conductive coil structure.
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Abstract
A method of manufacturing a coil inductor and a coil inductor are provided are provided. A plurality of conductive bottom structures are formed to be lying on a first dielectric layer. A plurality pairs of conductive side structures are then formed, wherein each pair of the conductive side structure stand on top surface of a first end and a second end of each conductive bottom structure respectively; a second dielectric layer is formed on the first dielectric layer, coating the bottom and side structures; and a plurality of conductive top structures are formed to be lying on the second dielectric layer, wherein each conductive top structure electrically connects each pair of the conductive side structures, wherein the conductive bottom structures, the conductive side structures and the conductive top structures together form a conductive coil structure.
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Citations
20 Claims
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1. A method of manufacturing a conductive coil inductor, wherein the conductive coil inductor is a solenoid, the method comprises the steps of:
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forming a plurality of conductive bottom structures lying on a first dielectric layer; forming a plurality pairs of conductive side structures, wherein each pair of the conductive side structure stand on top surface of a first end and a second end of each conductive bottom structure respectively;
forming a second dielectric layer on the first dielectric layer, coating the bottom and side structures; andforming a plurality of conductive top structures lying on the second dielectric layer, wherein each conductive top structure electrically connects each pair of the conductive side structures, wherein the conductive bottom structures, the conductive side structures and the conductive top structures together form a conductive coil structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of manufacturing a conductive coil inductor, wherein the conductive coil inductor is a spiral structure, the method comprises the steps of:
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forming a photo-resist layer on top of a first dielectric layer; patterning the photo-resist layer to form a spiral pattern; plating a conductive spiral layer on top of the first dielectric layer according to the patterned photo-resist layer; removing the photo-resist layer; and forming a ferromagnetic core at the center of the conductive spiral structure. - View Dependent Claims (18, 19, 20)
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Specification