BIO-SENSORS INCLUDING NANOCHANNEL INTEGRATED 3-DIMENSIONAL METALLIC NANOWIRE GAP ELECTRODES, MANUFACTURING METHOD THEREOF, AND BIO-DISK SYSTEM COMPRISING THE BIO-SENSORS
First Claim
1. A bio-sensor, comprising:
- an upper substrate block having a plurality of metallic nanowires formed on a lower surface thereof and including an injection port through which a biomaterial-containing sample is injected;
a lower substrate block having a plurality of metallic nanowires formed on an upper surface thereof; and
a supporting unit supporting the upper and lower substrate blocks so that the upper and lower substrate blocks are disposed spaced apart at a predetermined distance to form a nanochannel,wherein the metallic nanowires formed on the upper and lower substrate blocks are combined to form 3-dimensional metallic nanowire gap electrodes.
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Accused Products
Abstract
There are provided a bio-sensor including nanochannel-integrated 3-dimensional metallic nanowire gap electrodes, a manufacturing method thereof, and a bio-disk system comprising the bio-sensor. The bio-sensor includes an upper substrate block having a plurality of metallic nanowires formed on a lower surface thereof and including an injection port through which a biomaterial-containing sample is injected; a lower substrate block having a plurality of metallic nanowires formed on an upper surface thereof; and a supporting unit supporting the upper and lower substrate blocks so that the upper and lower substrate blocks can be disposed spaced apart at a predetermined distance to form a nanochannel, wherein the metallic nanowires formed on the upper and lower substrate blocks are combined to form 3-dimensional metallic nanowire gap electrodes.
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Citations
21 Claims
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1. A bio-sensor, comprising:
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an upper substrate block having a plurality of metallic nanowires formed on a lower surface thereof and including an injection port through which a biomaterial-containing sample is injected; a lower substrate block having a plurality of metallic nanowires formed on an upper surface thereof; and a supporting unit supporting the upper and lower substrate blocks so that the upper and lower substrate blocks are disposed spaced apart at a predetermined distance to form a nanochannel, wherein the metallic nanowires formed on the upper and lower substrate blocks are combined to form 3-dimensional metallic nanowire gap electrodes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 17, 18)
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8. A bio-sensor, comprising:
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an upper substrate block having a metal electrode formed on a lower surface thereof and including an injection port through which a biomaterial-containing sample is injected; a lower substrate block having a metal electrode formed on an upper surface thereof; and a supporting unit supporting the upper and lower substrate blocks so that the upper and lower substrate blocks are disposed spaced apart at a predetermined distance to form a nanochannel, wherein one of the metal electrodes formed on the upper and lower substrate blocks is formed of a plurality of metallic nanowires, and the metal electrodes formed on the upper and lower substrate blocks are combined to form 3-dimensional metallic nanowire gap electrodes. - View Dependent Claims (9)
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10. A method of manufacturing a bio-sensor, the method comprising:
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(a) forming a metal electrode on an upper surface of a lower substrate; (b) patterning a nanochannel on a resist to determine a width and a length of the nanochannel, the resist being applied onto a lower surface of an upper substrate; (c) etching the nanochannel using, as a mask, the pattern formed in operation (b); (d) forming a metal electrode on the nanochannel formed in operation (c); (e) arranging the upper and lower substrates using the metal electrodes formed on the upper and lower substrates; and (f) attaching the upper and lower substrates arranged in operation (e). - View Dependent Claims (11)
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12. A method of manufacturing a bio-sensor, the method comprising:
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(a) forming a plurality of metallic nanowires on an upper surface of a lower substrate; (b) forming a plurality of metallic nanowires on a lower surface of an upper substrate; (c) spin-coating a polymer onto the upper surface of the lower substrate to form a nanochannel; (d) determining a width and a length of the nanochannel and etching the polymer using a mask pattern; (e) arranging the upper and lower substrates using the metallic nanowires formed on the upper and lower substrates; and (f) attaching the upper and lower substrates arranged in operation (e). - View Dependent Claims (14, 15, 16)
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13. A method of manufacturing a bio-sensor, the method comprising:
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(a) forming a plurality of metallic nanowires on an upper surface of a lower substrate; (b) forming a plurality of metallic nanowires on a lower surface of an upper substrate; (c) spin-coating a polymer on the upper surface of the lower substrate to form a nanochannel; (d) arranging the upper and lower substrates using the metallic nanowires formed on the upper and lower substrates; (e) attaching the upper and lower substrates arranged in operation (d); and (f) determining a width and a length of the nanochannel and removing the polymer by UV exposure using the mask pattern. - View Dependent Claims (19, 20, 21)
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Specification