INSPECTION APPARATUS AND INSPECTION METHOD BY USING TERAHERTZ WAVE
First Claim
1. An inspection apparatus for conducting inspection of an object to be measured by using a terahertz wave, the inspection apparatus comprising:
- a terahertz wave generation portion;
a terahertz wave detection portion configured to detect a terahertz wave applied from the terahertz wave generation portion to the object to be measured, the terahertz wave being detected through the object to be measured;
a waveform shaping portion configured to shape a first answer signal with respect to the terahertz wave by using a signal acquired in the terahertz wave detection portion;
a measurement condition acquisition portion configured to acquire a first measurement condition;
an answer signal storage portion configured to store second answer signals associated with measurement conditions;
a selection portion configured to select the second answer signal from the answer signal storage portion by using the first measurement condition; and
a signal processing portion configured to conduct deconvolution with respect to the first answer signal on the basis of the second answer signal.
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Accused Products
Abstract
An inspection apparatus includes a terahertz wave detection portion, a waveform shaping portion configured to shape a first answer signal with respect to a terahertz wave by using a signal acquired in the above-described terahertz wave detection portion, a measurement condition acquisition portion configured to acquire a first measurement condition, an answer signal storage portion configured to store second answer signals corresponding to measurement conditions, a selection portion configured to select the above-described second answer signal from the above-described answer signal storage portion, and a signal processing portion configured to conduct deconvolution with respect to the above-described first answer signal on the basis of the above-described second answer signal.
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Citations
7 Claims
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1. An inspection apparatus for conducting inspection of an object to be measured by using a terahertz wave, the inspection apparatus comprising:
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a terahertz wave generation portion; a terahertz wave detection portion configured to detect a terahertz wave applied from the terahertz wave generation portion to the object to be measured, the terahertz wave being detected through the object to be measured; a waveform shaping portion configured to shape a first answer signal with respect to the terahertz wave by using a signal acquired in the terahertz wave detection portion; a measurement condition acquisition portion configured to acquire a first measurement condition; an answer signal storage portion configured to store second answer signals associated with measurement conditions; a selection portion configured to select the second answer signal from the answer signal storage portion by using the first measurement condition; and a signal processing portion configured to conduct deconvolution with respect to the first answer signal on the basis of the second answer signal. - View Dependent Claims (2, 3, 4, 5)
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6. An inspection method by using a terahertz wave, the method comprising the steps of:
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shaping a waveform serving as a first answer signal by detecting the terahertz wave applied to an object to be measured, the terahertz wave being detected through the object to be measured; and acquiring a measurement condition, wherein deconvolution with respect to the first answer signal is conducted by using a second answer signal corresponding to the acquired measurement condition. - View Dependent Claims (7)
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Specification