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SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

  • US 20090189156A1
  • Filed: 04/03/2009
  • Published: 07/30/2009
  • Est. Priority Date: 11/15/2005
  • Status: Active Grant
First Claim
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1. An active matrix display device comprising:

  • a thin film transistor over a substrate, the thin film transistor comprising;

    a gate electrode;

    a semiconductor film comprising zinc oxide over the gate electrode with a gate insulating film interposed therebetween;

    an insulating film comprising a resin material on the semiconductor film; and

    a pixel electrode formed over the insulating film and electrically connected to the thin film transistor.

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