Particle Counter With Improved Image Sensor Array
First Claim
1. An optical particle counter for optically detecting single unconstrained particles of less than one micron in size suspended in a flowing fluid, said optical particle counter comprising:
- a sample chamber having a fluid inlet and a fluid outlet;
a source of light;
a light-directing optical system directing said light through said sample chamber;
an optical collection system located to collect light scattered by said single unconstrained particles of less than one micron in size in said fluid flowing through said sample chamber; and
a detection system located to detect light collected by said optical collection system, said detection system including an optical detector producing an electric signal characteristic of the number of said single unconstrained particles of less than one micron in size which are detected;
wherein said optical detector comprises a CMOS imager.
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Accused Products
Abstract
A particle counter for optically detecting an unconstrained particle of less than one micron in size suspended in a flowing liquid includes a sample chamber having a fluid inlet and a fluid outlet; a laser module producing a laser beam; a beam shaping optical system providing a multiple laser beam pattern in the sample chamber; and a CMOS optical detector located to detect light scattered by the particles in the sample chamber. The particle counter has a particle sensing area within the sample chamber in which the intensity of light is at least 10 Watts/mm2, the sensing area having an area of 0.5 square mm or more. The detector has thirty or more detector array elements. In the preferred embodiment, the laser optical system reflects and refocuses the laser beam to effect multiple passes of the same laser beam through the sensing area.
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Citations
54 Claims
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1. An optical particle counter for optically detecting single unconstrained particles of less than one micron in size suspended in a flowing fluid, said optical particle counter comprising:
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a sample chamber having a fluid inlet and a fluid outlet; a source of light; a light-directing optical system directing said light through said sample chamber; an optical collection system located to collect light scattered by said single unconstrained particles of less than one micron in size in said fluid flowing through said sample chamber; and a detection system located to detect light collected by said optical collection system, said detection system including an optical detector producing an electric signal characteristic of the number of said single unconstrained particles of less than one micron in size which are detected; wherein said optical detector comprises a CMOS imager. - View Dependent Claims (2, 3, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of detecting single unconstrained particles of less than one micron in size in a flowing fluid, said method comprising:
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flowing said fluid containing said single unconstrained particles of less than one micron in size; directing a laser beam through said fluid flow; collecting light scattered by said single unconstrained particles of less than one micron in size in said fluid; and detecting said collected light with a CMOS imager and outputting a signal from said CMOS imager that is characteristic of a parameter of said single unconstrained particles of less than one micron in size. - View Dependent Claims (17, 18, 19)
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36. A method for optically detecting single unconstrained particles of less than one micron in size suspended in a flowing fluid, said method comprising:
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flowing said fluid containing said single unconstrained particles of less than one micron in size; directing a plurality of laser beams through said fluid flow; collecting light scattered by said single unconstrained particles of less than one micron in size in said fluid; and detecting said collected light and outputting a signal characteristic of a parameter of said single unconstrained particles of less than one micron in size;
wherein said plurality of laser beams define a plane with each beam passing through a different portion of said plane and said collecting comprises collecting said light about an optical axis perpendicular to said plane. - View Dependent Claims (37, 38, 39, 40, 42, 43)
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Specification