Device control method and apparatus

• US 20090190197A1
• Filed: 12/19/2008
• Published: 07/30/2009
• Est. Priority Date: 12/20/2007
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Verbeeck, Jozef Ferdinand Dymphna, Tinnemans, Patricius Aloysius Jacobus, Mulder, Heine Melle, Ravensbergen, Marius, Endendijk, Wilfred Edward
• Granted Patent: US 8,089,672 B2
• Time in Patent Office: Days
• US Class Current: 359/223.1
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G03F 7/70291 Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
• CPC Class Codes: G03F 7/70508 Data handling in all parts of the microlithographic apparatus, e.g. handling pattern data for addressable masks or data transfer to or from different components within the exposure apparatus
• CPC Class Codes: G09G 3/006 Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays testing individual LED's G01R31/2635; testing lamps G01R31/44; testing of optical features of LCD displays G02F1/1309
• CPC Class Codes: G09G 3/346 based on modulation of the reflection angle, e.g. micromirrors micromirrors devices per se G02B26/0833

Abstract

A method of controlling an element of an array of individually controllable elements. The method includes varying a frequency of a driving voltage with which the element is driven.

Claims

1. A method of controlling an element of an array of individually controllable elements, the method comprising:

varying a frequency of a driving voltage with which the element is driven.

2. The method according to claim 1, wherein the frequency is varied continuously.

3. The method according to claim 1, wherein the frequency is varied randomly.

4. The method according to claim 1, wherein the frequency is varied in a range defined by an upper and a lower limit.

5. The method according to claim 1, wherein the frequency is varied from a first value up to a second value and then back down to the first value.

6. The method according to claim 1, wherein the frequency is varied by varying the duty cycle of the driving voltage.

7. The method according to claim 1, wherein the frequency is varied by varying the time for which the voltage is high or low.

8. The method according to claim 1, wherein the frequency is varied by varying the time for which the voltage is positive or negative.

9. The method according to claim 1, wherein the frequency is varied by varying the time for which the voltage is zero or non-zero.

10. The method according to claim 1, wherein the frequency of the driving voltage or a frequency with which radiation beam pulses are incident upon the element are controlled to be synchronized with each other, such that the radiation beam pulses are not incident upon the element when the driving voltage is at a transitional voltage between a first voltage and a second voltage.

11. The method according to claim 1, wherein the element comprises a reflective surface or a mirror.

12. The method according to claim 11, wherein the element further comprises an electrode.

13. The method according to claim 1, further comprising using the array of individually controllable elements to form a pattern in a radiation beam.

14. The method according to claim 1, further comprising using the array of individually controllable elements in an illumination system to control properties of a radiation beam.

15. A control configuration arranged to control an element of an array of individually controllable elements, the control configuration being arranged to vary a frequency of a driving voltage with which the element is driven.

16. The control configuration according to claim 15, wherein the configuration is arranged to control the frequency of the driving voltage or a frequency with which radiation beam pulses are incident upon the element such that the frequencies are synchronized with one another, such that the radiation beam pulses are not incident upon the element when the driving voltage is at a transitional voltage between a first voltage and a second voltage.

17. The control configuration according to claim 15, wherein the array of individually controllable elements form part of an illumination system.

18. A method of controlling an element of an array of individually controllable elements, the element comprising a first part and a second part arranged to interact electrostatically with one another, the method comprising:

driving the first part of the element with a first driving voltage; and

driving the second part of the element with a second driving voltage.

19. The method according to claim 18, further comprising controlling the first driving voltage and the second driving voltage such that

when the first driving voltage moves from a low to a high voltage, the second driving voltage moves from a high to a low voltage;

and

when the first driving voltage moves from a high to a low voltage, the second driving voltage moves from a low to a high voltage.

20. The method according to claim 18, further comprising controlling the first driving voltage and the second driving voltage such that

when the first driving voltage moves from a zero voltage to a non-zero voltage, the second driving voltage moves from a non-zero voltage to a zero voltage;

and

when the first driving voltage moves from a non-zero voltage to a zero voltage, the second driving voltage moves from a zero voltage to a non-zero voltage.

21. The method according to claim 18, further comprising controlling the first driving voltage and the second driving voltage such that

when the first driving voltage moves from a negative to a positive voltage, the second driving voltage moves from a positive to a negative voltage;

and

when the first driving voltage moves from a positive to a negative voltage, the second driving voltage moves from a negative to a positive voltage.

22. The method according to claim 18, wherein the first driving voltage has a frequency that is equal to a frequency of the second driving voltage.

23. The method according to claim 18, wherein the second driving voltage varies in magnitude from zero volts to a voltage equal to that of a maximum operating range of an apparatus used to provide the second driving voltage.

24. The method according to claim 18, wherein the first part of the element is an electrode.

25. The method according to claim 18, wherein the second part comprises a reflective surface or a mirror.

26. The method according to claim 18, wherein the frequency of the first driving voltage and/or the second driving voltage, or a frequency with which radiation beam pulses are incident upon the element, are controlled to be synchronized with each other, such that the radiation beam pulses are not incident upon the element when the first driving voltage and/or the second driving voltage are at a transitional voltage between a first voltage and a second voltage.

27. The method according to claim 18, further comprising using the array of individually controllable elements to form a pattern in a radiation beam.

28. The method according to claim 18, further comprising using the array of individually controllable elements in an illumination system to control properties of a radiation beam.

29. A control configuration arranged to control a device, the device comprising:

a first part and a second part arranged to interact electrostatically with one another, the control configuration being arranged to;

drive the first part with a first driving voltage; and

drive the second part with a second driving voltage.

30. The control configuration according to claim 29, wherein the configuration is arranged to control the frequency of the first driving voltage and/or the second driving voltage, or a frequency with which radiation beam pulses are incident upon the element such that the frequencies are synchronized with one another, such that the radiation beam pulses are not incident upon the element when the first driving voltage and/or the second driving voltage are at a transitional voltage between a first voltage and a second voltage.

31. The control configuration according to claim 29, wherein the array of individually controllable elements form part of an illumination system.