Performance Analyses of Micromirror Devices
First Claim
1. A method of evaluating a quality of a micromirror array device having an array of micromirrors, each micromirror having a deflectable reflective mirror plate, the method comprising:
- (a) dynamically measuring a mechanical response of a mirror plate of a micromirror in the micromirror array in response to an altering driving force;
(b) determining an instant driving force of the altering driving force under which the mirror plate is at a desired state of the measured mechanical response;
(c) repeating steps (a) and (b) for a number of other micromirrors in the micromirror array; and
(d) evaluating the quality of the micromirror array device based on the determined instant driving forces.
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Abstract
The invention provides a method and apparatus for evaluating the product quality and performances of micromirror array devices through measurements of the electromechanical responses of the individual micromirrors to the driving forces of electric fields. The electromechanical responses of the micromirrors according to the present invention are described in terms of the rotational angles associated with the operational states, such as the ON and OFF state angles of the ON and OFF state when the micromirror array device is operated in the binary-state mode, and the response speed (i.e. the time interval required for a micromirror device to transit form one state to another) of the individual micromirrors to the driving fields.
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Citations
37 Claims
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1. A method of evaluating a quality of a micromirror array device having an array of micromirrors, each micromirror having a deflectable reflective mirror plate, the method comprising:
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(a) dynamically measuring a mechanical response of a mirror plate of a micromirror in the micromirror array in response to an altering driving force; (b) determining an instant driving force of the altering driving force under which the mirror plate is at a desired state of the measured mechanical response; (c) repeating steps (a) and (b) for a number of other micromirrors in the micromirror array; and (d) evaluating the quality of the micromirror array device based on the determined instant driving forces. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36)
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37-70. -70. (canceled)
Specification