×

Performance Analyses of Micromirror Devices

  • US 20090190825A1
  • Filed: 01/26/2009
  • Published: 07/30/2009
  • Est. Priority Date: 06/23/2004
  • Status: Abandoned Application
First Claim
Patent Images

1. A method of evaluating a quality of a micromirror array device having an array of micromirrors, each micromirror having a deflectable reflective mirror plate, the method comprising:

  • (a) dynamically measuring a mechanical response of a mirror plate of a micromirror in the micromirror array in response to an altering driving force;

    (b) determining an instant driving force of the altering driving force under which the mirror plate is at a desired state of the measured mechanical response;

    (c) repeating steps (a) and (b) for a number of other micromirrors in the micromirror array; and

    (d) evaluating the quality of the micromirror array device based on the determined instant driving forces.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×