Optical Modulator Including Electrically Controlled Ring Resonator
First Claim
1. An optical modulator, comprising:
- a waveguide for guiding an optical signal;
a ring resonator disposed in evanescent communication with said waveguide for at least one predetermined wavelength of the optical signal; and
a semiconductor pnpn junction structure at least partially coextensive with at least a portion of a resonant light path of said ring resonator, said optical modulator being configured such that said semiconductor pnpn junction structure receives an electrical control signal thereacross, the electrical control signal controlling a free carrier population in said resonant light path where coextensive with said pnpn junction structure to control a resonance condition of said ring resonator at said predetermined wavelength, said optical signal being thereby modulated according to said electrical control signal.
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Abstract
An optical modulator and related methods are described. In accordance with one embodiment, the optical modulator comprises a waveguide for guiding an optical signal, and further comprises a ring resonator disposed in evanescent communication with the waveguide for at least one predetermined wavelength of the optical signal. The optical modulator further comprises a semiconductor pnpn junction structure that is at least partially coextensive with at least a portion of a resonant light path of the ring resonator. The optical modulator is configured such that the semiconductor pnpn junction structure receives an electrical control signal thereacross. The electrical control signal controls a free carrier population in the resonant light path where coextensive with the pnpn junction structure. A resonance condition of the ring resonator at the predetermined wavelength is thereby controlled by the electrical control signal, and the optical signal is thereby modulated according to the electrical control signal.
30 Citations
20 Claims
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1. An optical modulator, comprising:
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a waveguide for guiding an optical signal; a ring resonator disposed in evanescent communication with said waveguide for at least one predetermined wavelength of the optical signal; and a semiconductor pnpn junction structure at least partially coextensive with at least a portion of a resonant light path of said ring resonator, said optical modulator being configured such that said semiconductor pnpn junction structure receives an electrical control signal thereacross, the electrical control signal controlling a free carrier population in said resonant light path where coextensive with said pnpn junction structure to control a resonance condition of said ring resonator at said predetermined wavelength, said optical signal being thereby modulated according to said electrical control signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for modulating an optical signal, comprising:
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causing the optical signal to propagate along a waveguide that passes in evanescent proximity to a ring resonator with respect to a predetermined wavelength of the optical signal, the ring resonator defining a resonant light path therearound; and applying an electrical control signal across a semiconductor pnpn junction structure that is at least partially coextensive with the resonant light path, the electrical control signal controlling a free carrier population in the resonant light path where coextensive with the semiconductor pnpn junction structure to thereby control a resonance condition of the ring resonator at the predetermined wavelength, the optical signal being thereby modulated according to the applied electrical control signal. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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18. A method of fabricating an electrooptical modulator, comprising:
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forming an optical waveguide on a semiconductor substrate; forming an optical ring resonator on said semiconductor substrate within an evanescent coupling distance of said optical waveguide with respect to a predetermined wavelength of an optical signal to propagate along said optical waveguide, said optical ring resonator defining a resonant light path therearound; and forming a semiconductor pnpn junction structure comprising, in adjacent spatial order, a first layer of relatively heavily p-doped semiconductor material, a second layer of relatively lightly n-doped semiconductor material, a third layer of relatively lightly p-doped semiconductor material, and a fourth layer of relatively heavily n-doped semiconductor material; and forming electrical contacts configured to apply an electrical modulation signal between said first and fourth layers of said semiconductor pnpn junction structure; wherein said semiconductor pnpn junction structure is formed relative to said optical ring resonator such that at least one of said second and third layers thereof is integral with at least a portion of said resonant light path. - View Dependent Claims (19, 20)
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Specification