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METHOD AND SYSTEM OF MONITORING MANUFACTURING EQUIPMENT

  • US 20090192632A1
  • Filed: 01/30/2008
  • Published: 07/30/2009
  • Est. Priority Date: 01/30/2008
  • Status: Active Grant
First Claim
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1. A method, comprising:

  • operating a tool working at an operating mode such that at least one of its control parameters is outside of a normal operating range;

    measuring the at least on of the control parameters of the tool working at the operating mode outside of the normal operating range; and

    detecting a change to a condition of the tool based on the measuring of the at least one control parameter.

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