ANGULAR VELOCITY SENSOR
First Claim
1. An angular velocity sensor comprising:
- a reference vibrator supported so as to generate reciprocating rotational vibration about a first rotation axis as a center;
a detection vibrator supported by the reference vibrator so as to generate reciprocating rotational vibration about a second rotation axis, which is different from the first rotation axis, as a center;
a reference vibration generating unit for allowing the reference vibrator to generate reciprocating rotational vibration; and
a detection unit for detecting a displacement amount of the detection vibrator with respect to the reference vibrator, which is in association with the reciprocating rotational vibration of the detection vibrator.
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Abstract
Provided is an angular velocity sensor including: a reference vibrator supported so as to generate reciprocating rotational vibration about a first rotation axis as a center; a detection vibrator supported by the reference vibrator so as to generate reciprocating rotational vibration about a second rotation axis, which is different from the first rotation axis, as a center; a reference vibration generating unit for allowing the reference vibrator to generate reciprocating rotational vibration; and a detection unit for detecting a displacement amount of the detection vibrator with respect to the reference vibrator, which is in association with the reciprocating rotational vibration of the detection vibrator.
30 Citations
9 Claims
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1. An angular velocity sensor comprising:
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a reference vibrator supported so as to generate reciprocating rotational vibration about a first rotation axis as a center; a detection vibrator supported by the reference vibrator so as to generate reciprocating rotational vibration about a second rotation axis, which is different from the first rotation axis, as a center; a reference vibration generating unit for allowing the reference vibrator to generate reciprocating rotational vibration; and a detection unit for detecting a displacement amount of the detection vibrator with respect to the reference vibrator, which is in association with the reciprocating rotational vibration of the detection vibrator. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification