CHARGED PARTICLE RADIATION APPARATUS

• US 20090194692A1
• Filed: 01/29/2009
• Published: 08/06/2009
• Est. Priority Date: 01/31/2008
• Status: Abandoned Application

• Current Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Original Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Inventors: KOBARU, Atsushi
• Application Number:
  US12/362,000
• Publication Number:
  US 20090194692A1
• Time in Patent Office: Days
• US Class Current: 250/311
• CPC Class Codes: H01J 2237/0264 magnetic
• CPC Class Codes: H01J 2237/26 Electron or ion microscopes
• CPC Class Codes: H01J 2237/28 Scanning microscopes
• CPC Class Codes: H01J 2237/31749 Focused ion beam
• CPC Class Codes: H01J 37/09 Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Abstract

A magnetic shield with which a high magnetic field suppression effect is realized in a restricted space and a charged particle radiation apparatus using the magnetic shield are described below. To achieve the above-described object, a scanning electron microscope wherein a shield for shielding against an external magnetic field is formed of a plurality of plate portions made of a magnetic material, the plate portions being disposed on the circumference of a circle whose center corresponds to a center of the space so that each plate portion has a surface direction set different from a line tangent to the circle, is proposed (see FIG. 1).

Claims

1. An apparatus comprising a shield for reducing the influence of a magnetic field flowing from the outside into a predetermined space,

wherein the shield has a plurality of plate portions made of a magnetic material, the plate portions being disposed on the circumference of a circle whose center corresponds to a center of the space so that each plate portion has a surface direction set different from a line tangent to the circle.

2. The apparatus according to claim 1, further comprising at least one inner shield in plate form concentric to the circle.

3. A charged particle radiation apparatus comprising the shield according to claim 1.

4. A charged particle radiation apparatus comprising the shield according to claim 2.

5. A charged particle radiation apparatus comprising a charged particle radiation optical system in which a charged particle beam emitted from a charged particle source is converged and applied to a specimen, and a tubular member surrounding the charged particle radiation optical system,

wherein a magnetic shield having a plurality of plate portions having surfaces parallel to the optical axis of the charged particle beam is provided around the tubular member, and one of opposite sides of each plate portion is formed by being set away from the optical axis relative to the other of the opposite sides.

6. The charged particle radiation apparatus according to claim 5, wherein the magnetic shield has a triangular member having the plate portion as its one side as seen along the optical axis of the charged particle beam.

7. The charged particle radiation apparatus according to claim 5, wherein a plurality of layers of the magnetic shield are formed about the optical axis of the charged particle beam.

8. The charged particle radiation apparatus according to claim 5, wherein the plurality of plate portions are formed of a magnetic material.

9. The charged particle radiation apparatus according to claim 8, wherein the tubular member is formed of a magnetic material.