DOSIMETRY USING OPTICAL EMISSION SPECTROSCOPY/RESIDUAL GAS ANALYZER IN CONJUNCTION WITH ION CURRENT
First Claim
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1. An apparatus for processing a substrate, comprising:
- a process chamber defining a process volume;
a conductive support pedestal positioned in the process volume;
a gas distribution assembly connected to a gas panel and positioned parallel the conductive support pedestal, wherein an RF plasma bias power supply is coupled between the gas distribution assembly and the conductive support pedestal;
a first sensor configured to monitor one or more attributes of a plasma generated in the process volume;
a second sensor configured to monitor one or more attribute of the RF plasma bias power supply; and
a controller coupled to the first and second sensors, wherein the controller is configured to receive and analyze signals from the first and second sensors.
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Abstract
The present invention generally provides methods and apparatus for controlling ion dosage in real time during plasma processes. In one embodiment, ion dosages may be controlled using in-situ measurement of the plasma from a mass distribution sensor combined with in-situ measurement from an RF probe.
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Citations
20 Claims
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1. An apparatus for processing a substrate, comprising:
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a process chamber defining a process volume; a conductive support pedestal positioned in the process volume; a gas distribution assembly connected to a gas panel and positioned parallel the conductive support pedestal, wherein an RF plasma bias power supply is coupled between the gas distribution assembly and the conductive support pedestal; a first sensor configured to monitor one or more attributes of a plasma generated in the process volume; a second sensor configured to monitor one or more attribute of the RF plasma bias power supply; and a controller coupled to the first and second sensors, wherein the controller is configured to receive and analyze signals from the first and second sensors. - View Dependent Claims (2, 3, 4, 5, 6)
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7. An apparatus for processing a substrate, comprising:
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a plasma reactor having a process volume; a first sensor configured to monitor one or more attributes of a plasma generated in the process volume by a RF bias power supply coupled to the plasma reactor; a second sensor configured to monitor one or more attribute of a RF bias power supply; and a controller coupled to the first and second sensors, wherein the controller is configured perform a process comprising; obtaining a value of the one or more attributes of the plasma from the first sensor; obtaining a value of the one or more attributes of the RF bias power supply from the second sensor; and determining a real time dose value of one or more ion species in the plasma from the value of the one or more attributes of the plasma and the value of the one or more attributes of the RF bias power supply. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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14. An apparatus for processing a substrate, comprising:
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a process chamber defining a process volume; a conductive support pedestal positioned in the process volume and configured to support the substrate during processing; a gas distribution assembly positioned parallel the conductive support pedestal; an RF plasma bias power supply coupled between the gas distribution assembly and the conductive support pedestal and configured to generate a plasma in the process volume; a first sensor configured to monitor one or more attributes of the plasma generated in the process volume; a second sensor configured to monitor one or more attribute of the RF plasma bias power supply; and a controller coupled to the first and second sensors, wherein the controller is configured to apply a desired dose of a material to the substrate. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification