Apparatus for profile irregularity measurement and surface imperfection observation; method of profile irregularity measurement and surface imperfection observation; and inspection method of profile irregularity and surface imperfection
First Claim
1. An apparatus for profile irregularity measurement and surface imperfection observation of an inspection-object surface of an inspection-object lens, using a Fizeau interferometric optical system, comprising a beam control device,wherein the beam control device has:
- a first beam control plate constructed and arranged to allow for confirmation of a position of the inspection-object lens in a positional adjustment of the inspection-object lens;
a second beam control plate having an aperture region at a center thereof and a shading region around the aperture region; and
a third beam control plate having a shading region at a center thereof and an aperture region around the shading region, andis constructed and arranged so that a desired one of the beam control plates is insertable and removable on an imaginary plane in which a light convergence point of reflected light from a reference surface of the interferometric optical system lies and which is perpendicular to an optical axis of the interferometric optical system.
1 Assignment
0 Petitions
Accused Products
Abstract
An apparatus for performing surface measurement of an inspection-object surface and profile irregularity measurement and surface defect observation of an inspection-object lens using a Fizeau interferometric optical system. The apparatus is provided with a beam control device that has a first beam control plate configured to allow for confirmation of a position of the inspection-object lens in a positional adjustment of the inspection-object lens, a second beam control plate having an aperture region at a center thereof and a shading region around the aperture region, and a third beam control plate having a shading region at a center thereof and an aperture region around the shading region, and that is configured so that a desired one of these beam control plates is insertable and removable on an imaginary plane in which a light convergence point of reflected light from the reference surface of the interferometric optical system lies and which is perpendicular to an optical axis of the interferometric optical system.
6 Citations
6 Claims
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1. An apparatus for profile irregularity measurement and surface imperfection observation of an inspection-object surface of an inspection-object lens, using a Fizeau interferometric optical system, comprising a beam control device,
wherein the beam control device has: -
a first beam control plate constructed and arranged to allow for confirmation of a position of the inspection-object lens in a positional adjustment of the inspection-object lens; a second beam control plate having an aperture region at a center thereof and a shading region around the aperture region; and a third beam control plate having a shading region at a center thereof and an aperture region around the shading region, and is constructed and arranged so that a desired one of the beam control plates is insertable and removable on an imaginary plane in which a light convergence point of reflected light from a reference surface of the interferometric optical system lies and which is perpendicular to an optical axis of the interferometric optical system. - View Dependent Claims (2, 3)
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4. A method of profile irregularity measurement and surface imperfection observation of an inspection-object surface of an inspection-object lens using a Fizeau interferometric optical system, comprising:
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a first process of setting a first beam control plate configured to be capable of confirming a position of the inspection-object lens on an imaginary plane in which a light convergence point of reflected light from a reference surface of the interferometric optical system lies and which is perpendicular to an optical axis of the interferometric optical system while adjusting a position of the inspection-object lens so that light emergent from a reference surface of the interferometric optical system is incident on a surface of the inspection-object lens perpendicular thereto; a second process of performing interference fringe observation upon exchanging the first beam control plate for a second beam control plate having an aperture region at a center thereof and a shading region around the aperture region after the first process; a third process of performing dark-field observation upon exchanging the second beam control plate for a third beam control plate having a shading region at a center thereof and an aperture region around the shading region after the second process; and a fourth process of performing bright-field observation upon decentering the inspection-object lens after the third process. - View Dependent Claims (5)
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6. An inspection method of profile irregularity and surface irregularity of an inspection-object surface of an inspection-object lens using a Fizeau interferometer, comprising:
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a process of inspecting profile irregularity of the inspection-objectsurfaceusinginterferencefringesthataregenerated by superposition of reference light reflected from a reference surface and measurement light transmitted through the reference surface and reflected from the inspection-object surface, upon adjusting positions of the reference surface and the inspection-object surface; and a process of inspecting surface imperfection of the inspection-object surface using the measurement light transmitted through the reference surface and reflected from the inspection-object surface upon adjusting the positions of the reference surface and the inspection-object surface to remove the reference light reflected from the reference surface.
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Specification