IMAGING SYSTEM AND METHOD

• US 20090195790A1
• Filed: 08/09/2006
• Published: 08/06/2009
• Est. Priority Date: 09/02/2005
• Status: Abandoned Application

• Current Assignee: Neptec Technologies
• Original Assignee: Neptec Technologies
• Inventors: English, Chad, Zhu, Xiang, Smith, I. Christine
• Application Number:
  US12/065,448
• Publication Number:
  US 20090195790A1
• Time in Patent Office: Days
• US Class Current: 356/612
• CPC Class Codes: G01B 11/24 for measuring contours or curvatures

Abstract

An apparatus for measuring the coordinates of a point on the surface of an object comprises a projection system for projecting a beam of energy onto the surface of the object, a receiving system for receiving reflected beam energy from the target surface, and a detector for detecting the received energy. The projection system comprises a beam expander for expanding the width of the beam, and a focussing device for focussing the projected beam. The position of the reflected beam energy at the detector provides a measure of the range of the point on the target surface using triangulation and the direction of the projected beam provides the x and y coordinates. The focussing device can be controlled to vary the focal length of the projected beam and to control the beam size at the target object to vary the area of the target surface illuminated by the beam and thereby to control the resolution of the measurements.

Claims

1. An apparatus comprising a projection system for projecting a beam of energy onto a target surface, a receiving system for receiving reflected beam energy from the target surface, a detector for detecting the received energy;

wherein the projection system comprises a beam expander for receiving a beam of energy and expanding the width of the beam, and a focusing device for focusing the projected beam.

2. An apparatus as claimed in claim 1, wherein said beam expander is capable of expanding said beam to a beam size of 5 millimeters or more.

3. An apparatus as claimed in claim 2, wherein said beam expander is capable of expanding said beam to a size of 10 mm or more, 15 millimeters or more, 20 millimeters or more, or 25 millimeters or more.

4. An apparatus as claimed in claim 1, wherein said focusing device is capable of focusing said beam to a width of 500 microns or less, 400 microns or less, 300 microns or less, 200 microns or less, 100 microns or less, 75 microns or less, 50 microns or less, or 25 microns or less.

5. An apparatus as claimed in claim 1, wherein said beam expander comprises a variable expander for varying the size of the beam.

6. An apparatus as claimed in claim 1, wherein said focusing device comprises a variable focusing device for varying the focal length of the projected beam and/or the size of the beam at the target surface.

7. An apparatus as claimed in claim 1, wherein said detector comprises a position detector for detecting the position of the received reflected beam, wherein the position is dependent on the angle between the incident and reflected beam energy at the target surface and thereby on the distance between said apparatus and the position from which said beam is reflected from said surface.

8. An apparatus as claimed in claim 7, wherein the position detector comprises a plurality of beam sensitive sensors.

9. An apparatus as claimed in claim 5, wherein said detector comprises a position detector for detecting the position of said received reflected beam, wherein the position is dependent on the angle between the incident and reflected beam energy at the target surface and thereby on the distance between said apparatus and the position from which said beam is reflected from said surface, and said apparatus further comprises a controller for controlling the variable beam expander and/or the variable focusing device based on the detected position.

10. An apparatus as claimed in claim 1, wherein said detector comprises a position detector for detecting the position of the received reflected beam, wherein the position is dependent on the angle between the incident and reflected beam energy at the target surface and thereby on the distance between said apparatus and the position from which said beam is reflected from said surface, and said apparatus further comprises a controller for controlling the size of the beam at the target surface based on said detected position.

11. An apparatus as claimed in claim 1, wherein said focussing device comprises a zoom lens.

12. An apparatus as claimed in claim 11, further comprising determining means for determining the distance between the apparatus and the position of the beam at said target surface based on said detected position, and wherein said controller is adapted to control the beam size at the target surface based on the determined distance.

13. An apparatus as claimed in claim 12, wherein at least one of said beam expander and said focussing device is variable and said controller is adapted to control the beam size at the target surface by controlling said beam expander and/or said focussing device.

14. An apparatus as claimed in claim 13, further comprising a beam steering system for steering the projected beam to intercept said target surface at a plurality of different positions, and wherein said controller is adapted to control the beam size at the target surface at each of a plurality of different positions.

15. An apparatus as claimed in claim 14, wherein said controller is adapted to maintain said beam size at said target surface within a predetermined range, or at substantially the same predetermined value for each different position.

16. An apparatus as claimed in claim 1, further comprising a collimator for collimating said beam.

17. An apparatus as claimed in claim 16, wherein said collimator is positioned upstream of said beam expander in the beam direction.

18. An apparatus as claimed in claim 1, wherein said projection system further comprises a beam steering system for steering said projected beam.

19. An apparatus as claimed in claim 18, wherein said beam steering system comprises a first device for steering said beam along a first direction and a second device for steering said beam along a second direction, orthogonal to said first direction.

20. An apparatus as claimed in claim 19, wherein said first and second devices are spaced apart and said beam is introduced into said beam steering system between said first and second devices and in a direction along a plane generally transverse to the direction in which the first and second devices are spaced apart.

21. An apparatus as claimed in claim 20, further comprising a reflector for reflecting said beam onto said first device.

22. An apparatus as claimed in claim 21, wherein said reflector comprises one of a prism and a planar mirror.

23. An apparatus as claimed in claim 20, wherein said first device comprises a planar mirror.

24. An apparatus as claimed in claim 23, further comprising mounting means for rotatably mounting said planar mirror.

25. An apparatus as claimed in claim 24, further comprising an actuator for driving rotation of said mirror to any predetermined position.

26. An apparatus as claimed in claim 24 or 25, further comprising a controller for controlling the rotational position of said first device.

27. An apparatus as claimed in claim 23, wherein said first device is in the form of a plate.

28. An apparatus as claimed in claim 27, wherein said receiving system comprises a reflector for receiving beam energy reflected from the target surface, and wherein said reflector is disposed on one side of said plate.

29. An apparatus as claimed in claim 28, wherein said detector is capable of detecting the position of the beam reflected from the reflector to provide a parameter for measuring the distance to a target object in the range or z-direction.

30. An apparatus as claimed in claim 18, further comprising a position detector for detecting the position of said received reflected beam, wherein the position is dependent on the angle between the incident and reflected beam energy at the target surface and thereby on the distance between said apparatus and the position from which said beam is reflected from said surface, and said apparatus further comprises a controller for controlling the beam size at said target surface based on the trajectory of said projected beam and/or the position of said beam at the target surface.

31. An apparatus as claimed in claim 1, wherein said receiving system further comprises a device for at least one of (i) forming an image of the received beam energy on said detector, (ii) focussing the beam energy on the detector, and (iii) controlling the size of the reflected beam at said detector.

32. An apparatus as claimed in claim 31, wherein said device comprises at least one lens.

33. An apparatus as claimed in claim 31, wherein the magnification factor M of the device or f/D has a value such that the size, ω

_i, of the beam at the detector is less than two times the diffraction limited spot size of the device, or approximately equal to the diffraction limited spot size.

34. An apparatus as claimed in claim 31, further comprising means defining an aperture for reducing the aperture of the device.

35. An apparatus as claimed in claim 34, wherein the size of the aperture is such that the size ω

_i of the beam at the detector is less than two times the diffraction limited spot size.

36. An apparatus as claimed in claim 1, wherein said detector comprises an array of beam sensitive detectors, each having a beam receiving area, and wherein said receiving system includes a device for making the beam size, ω

_i, at the detector array greater than the area of a said beam sensitive detector, and preferably equal to or greater than the area of 2 or 3 beam sensitive detectors.

37. An apparatus as claimed in claim 1, wherein said beam of energy comprises a beam of (i) coherent radiation, or (ii) non-coherent radiation.

38. An apparatus as claimed in claim 1, further comprising a generator for generating said beam of energy.

39. An apparatus as claimed in claim 38, wherein said generator comprises a laser.

40. An apparatus as claimed in claim 38, further comprising an optical fiber at the output of said generator.

41. An apparatus as claimed in claim 1, further comprising a controller for controlling the power of said beam at said target surface.

42. An apparatus as claimed in claim 41, wherein said controller is adapted to control said power in response to a parameter indicative of the size of said beam at said target surface.

111. An apparatus as claimed in claim 1, further comprising identifying means for identifying said object.

112. An apparatus as claimed in claim 111, further comprising recording means coupled to the identifying means for recording an identity of said object.

113. An apparatus as claimed in claim 111, wherein said identifying means comprises any one or more of a part number reader, a bar code reader and a means for identifying a feature of said object.

43. An apparatus comprising a projection system for projecting a beam of energy onto a target object, a receiving system for receiving reflected beam energy from the target object, a detector for detecting the received energy;

wherein said projection system comprises a focusing device for focusing the projected beam and wherein the width of the beam exiting said focusing device is 5 millimeters or more, 10 millimeters or more, 15 millimeters or more, 20 millimeters or more or 25 millimeters or more.

44. An apparatus comprising a projection system for projecting a beam of energy onto a target object, a receiving system for receiving reflected beam energy from the target object, a detector for detecting the received energy;

wherein said projection system comprises a focusing device for focusing said projected beam to a beam width of 500 microns or less, 400 microns or less, 300 microns or less, 200 microns or less, 100 microns or less, 75 microns, 50 microns or less, or 25 microns or less.

45. An apparatus comprising a projection system for projecting a beam of energy onto a target object, a receiving system for receiving reflected beam energy from the target object, a detector for detecting the received energy, wherein said projection system comprises a focusing device for focusing the projected beam, a beam steering system comprising a first device for moving said beam along a first direction and a second device for moving said beam along a second direction orthogonal to said first direction, said first and second devices being spaced apart and a reflector between said first and second devices for reflecting a beam introduced along a plane transverse to the direction in which said first and second devices are spaced apart and between said first and second devices, towards said first device.

46. An apparatus as claimed in claim 45, wherein said reflector comprises a prism.

47. An apparatus comprising a projection system for projecting a beam of energy onto a target object, a receiving system for receiving reflected beam energy from the target object, a detector for detecting the received energy;

wherein said projection system comprises a variable focusing device for varying the focal length of the projected beam and for focusing the beam onto the target object.

48. An apparatus as claimed in claim 47, further comprising a measuring system for measuring a parameter indicative of whether said beam is focused at said target object.

49. An apparatus as claimed in claim 48, wherein said parameter is related to the distance between said focusing device and said object.

50. An apparatus as claimed in claim 48, further comprising a controller for varying the focal length of the beam in response to the measured parameter.

51. An apparatus as claimed in claim 47, wherein said projection system comprises a scanner for scanning the projected beam in at least one direction.

52. An apparatus as claimed in claim 47, wherein said projection system comprises a scanner for scanning the projected beam in a first direction and for scanning the projected beam in a second direction orthogonal to said first direction.

53. An apparatus as claimed in claim 47, further comprising a scanner for scanning the received beam energy onto the detector.

54. An apparatus as claimed in claim 53, wherein said scanner is adapted for scanning the received beam energy in a first direction and a second direction orthogonal to said first direction.

55. An apparatus as claimed in claim 51, further comprising a scanner for scanning the received beam energy onto the detector as the projected beam scans said target object.

56. An apparatus as claimed in claim 47, wherein said detector is adapted for detecting changes in the position of the reflected beam energy due to changes in the position along the range direction on the object from which said beam is reflected.

57. An apparatus as claimed in claim 56, wherein the position of the reflected beam energy at the detector depends on the angle between the projected beam and the reflected beam energy at the target surface.

58. An apparatus as claimed in claim 56, further comprising determining means for determining a value of said position along said range direction based on the position of the received energy on said detector.

59. An apparatus as claimed in claim 58, further comprising a controller for controlling the variable focussing device to control the beam size at the target surface based on the position of the reflected beam energy on the detector and/or the range of the position on the target surface from which said beam is reflected as determined by said determining means.

60. An apparatus as claimed in claim 56, further comprising a steering system for steering said projected beam, and determining means for determining the three dimensional position at which said projected beam intercepts the target surface, based on the beam direction and the detected position of the received beam energy at the detector.

61. An apparatus as claimed in claim 60, further comprising a controller for controlling said variable focusing device to control the beam size at the target surface at each of a plurality of different positions on the target surface.

62. An apparatus as claimed in claim 61, wherein said controller is adapted to control said beam size in accordance with a predetermined beam size criterion.

63. An apparatus as claimed in claim 62, wherein said criterion comprises maintaining said beam size within a predetermined range or at a predetermined value for different positions on said target surface.

64. An apparatus as claimed in claim 60, further comprising a comparison means for comparing data derived from one or more three dimensional position measurements of the target object with data defining a model of the object.

65. An apparatus as claimed in claim 47, wherein said receiving system further comprises a focusing device for focusing the received beam energy onto said detector.

66. An apparatus as claimed in claim 47, wherein said projection system comprises a scanner for scanning said projected beam, and wherein said scanner comprises a movable reflector.

67. An apparatus as claimed in claim 66, further comprising mounting means for rotatably mounting said reflector for rotation about an axis.

68. An apparatus as claimed in claim 67, wherein said axis is proximate the reflective surface of said reflector.

69. An apparatus as claimed in claim 67, wherein said reflector has a width and a thickness and the width of said reflector is greater than its thickness.

70. An apparatus as claimed in claim 69, wherein said reflector is in the form of a plate.

71. An apparatus as claimed in claim 66, further comprising a scanner for scanning said received beam in a first direction and wherein said scanner comprises a reflector operably connected to the scanner for scanning said projected beam in said first direction.

72. An apparatus as claimed in claim 66, further comprising a driver for driving movement of said scanner and a controller for periodically changing the direction of movement of said deflector.

73. An apparatus as claimed in claim 72, wherein said controller is capable of changing the range of the scan.

74. An apparatus as claimed in claim 72, wherein said controller is adapted to control the position of at least one end of the range of the scan.

75. An apparatus as claimed in of claim 66, further comprising a second scanner for scanning said beam in a second direction orthogonal to said first direction and a reflector between said first and second scanners for reflecting said beam onto said first scanner.

76. An apparatus as claimed in claim 75, wherein said reflector comprises a prism.

77. An apparatus as claimed in claim 47, wherein said projection system further comprises a beam expander for expanding the size of said beam.

78. An apparatus as claimed in claim 77, wherein said beam expander is positioned before said focusing device.

79. An apparatus as claimed in claim 47, further comprising a collimator for collimating said projected beam before said focussing device.

80. An apparatus as claimed in claim 79, further comprising a laser source for generating said beam of energy and for feeding said energy into said collimator.

81. An apparatus as claimed in claim 77 to, wherein said beam expander is capable of outputting a beam having a diameter of at least 5 millimeters or more.

82. An apparatus as claimed in claim 81, wherein said beam expander is capable of outputting a beam having a diameter in the range of between 5 to 40 millimeters or more.

83. An apparatus as claimed in claim 47, wherein the beam output from said focusing device has a width of 5 to 40 millimeters or more.

84. An apparatus as claimed in claim 47, wherein said focusing device is capable of focusing said beam at said object to a beam width of between 500 and 10 microns or less.

85. An apparatus as claimed in claim 84, wherein said focusing device is capable of focusing said beam at said object to a width of between 1 and 200 microns.

86. A method of obtaining information about a target object comprising the steps of:

projecting a beam of energy onto a target object, measuring a parameter for use in focusing the beam onto the object,

controlling the focal length of the beam based on said parameter to control the beam size at the target object, receiving beam energy reflected from said object,

detecting the position of the reflected beam energy, and

based on said detected position, determining the position of the beam on said target along a z-direction extending between said object and a reference position spaced from said object.

87. A method as claimed in claim 86, further comprising determining the position of the beam on said object in at least one other direction orthogonal to said z-direction.

88. A method as claimed in claim 86, further comprising focusing the received beam energy onto a detector.

89. A method as claimed in claim 86, wherein said parameter is indicative of the focal length of the beam required to focus the beam onto the object.

90. A method as claimed in claim 89, wherein the step of measuring said parameter comprises receiving beam energy reflected from said object, detecting the position of the reflected beam energy and measuring said parameter on the basis of the detected position of said reflected beam energy, wherein said position of the received reflected beam energy depends on the angle between the projected beam and direction of the received reflected beam energy at the target surface.

91. A method as claimed in claim 86, further comprising directing said beam to each of a plurality of selected different positions on said object, and for each position, detecting the position of the reflected beam energy, and determining the position of the beam on said object along said z-direction based on said detected position.

92. A method as claimed in claim 91, further comprising the steps of selecting a discreet area on said object that is smaller than the total area of said object that can be viewed in one direction and restricting said plurality of selected different positions on said object to said discreet area.

93. A method as claimed in claim 92, further comprising identifying the position of a feature of said object in at least one direction orthogonal to said z-direction based on said determined positions.

94. A method as claimed in claim 92, further comprising directing said beam to a position on said object outside said discreet area, detecting the position of the reflected beam energy and determining the position of the beam on said object along said z-direction based on said detected position.

95. A method as claimed in claim 92, further comprising selecting another discreet area on said object that is smaller than the total area of said object that can be viewed from one direction, directing said beam to each of a plurality of selected different positions on said object within said other area, and for each position, detecting the position of the reflected beam, and determining the position of the beam on said object along said direction based on said detected position.

96. A method as claimed in claim 95, further comprising identifying the position of a feature of said object based on said determined positions.

97. A method as claimed in claim 96, further comprising determining a parameter indicative of the physical relationship between said identified features.

98. A method as claimed in claim 97, further comprising comparing said parameter with a predetermined parameter.

99. A method as claimed in claim 97, wherein said parameter comprises at least one of a distance and an angle between said features.

100. A method as claimed in claim 92, further comprising selecting said discreet area based on an image of said object.

101. A method as claimed in claim 100, wherein said image comprises a photographic image.

102. A method as claimed in claim 86, further comprising the steps of selecting a discreet area on said object that is smaller than the total area of said object that can be viewed from one direction, making a plurality of measurements at different positions on said object within said area, each measurement comprising the steps of detecting the position of the reflected beam energy from said object and determining the position of the beam on said object along said z-direction based on said detected position.

103. A method as claimed in claim 102, further comprising determining the position of the beam on said object in at least one of said other orthogonal directions.

104. A method as claimed in claim 86, comprising moving said projected beam to a plurality of different locations on said target object, and for each location, measuring the three dimensional position of the projected beam at the target surface by measuring the direction of the projected beam and the range of the position of the projected beam at the target surface from the position of the received reflected beam energy, and controlling the beam size at the target surface at each location.

105. A method as claimed in claim 104, comprising controlling the beam size according to a predetermined criteria.

106. A method as claimed in claim 104, comprising controlling the focal length of the beam to maintain the beam size in accordance with said criteria for each different location.

107. A method as claimed in claim 106, comprising controlling the focal length based on the position of the detected reflected beam energy.

108. A method as claimed in claim 104, further comprising comparing data derived from said position measurements with data derived from a model of said object.

109. A method of obtaining information about a target surface comprising generating from said surface first data containing information about said target surface,

identifying a feature from said first data, and

generating from said target surface second data containing information about said feature, wherein the second data contains different information about said feature than said first data.

110. A method as claimed in claim 109, wherein obtaining information comprises performing a method as claimed in claim 86.