MECHANICAL LIGHT MODULATORS WITH STRESSED BEAMS
First Claim
1. A spatial light modulator comprising:
- a substrate having a surface; and
a modulation assembly coupled to the substrate including a modulation element and a compliant beam, wherein the modulation assembly is configured to limit the bending of the compliant beam towards an opposing surface that would otherwise be caused by inherent stresses within the compliant beam.
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Accused Products
Abstract
The invention relates to a spatial light modulator including a substrate having a surface and a modulation assembly coupled to the substrate including a modulation element and a compliant beam. The modulation assembly is configured to limit the bending of the compliant beam towards an opposing surface that would otherwise be caused by inherent stresses within the compliant beam. The invention also relates to a method of manufacturing a spatial light modulator including the steps of forming and releasing a modulation assembly that has a modulation element and a compliant beam formed in a pre-release position to have an intended inherent stress state. As a result of the stress state in the compliant beam, upon release of the compliant beam, the compliant beam bends into a rest position which is different than the pre-release position, where the rest position is based in part on the intended inherent stress state.
146 Citations
29 Claims
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1. A spatial light modulator comprising:
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a substrate having a surface; and a modulation assembly coupled to the substrate including a modulation element and a compliant beam, wherein the modulation assembly is configured to limit the bending of the compliant beam towards an opposing surface that would otherwise be caused by inherent stresses within the compliant beam. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of manufacturing a spatial light modulator comprising:
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forming a modulation assembly including a modulation element and a compliant beam, wherein the compliant beam is formed in a pre-release position to have an intended inherent stress state, and releasing the modulation assembly; whereby, as a result of the stress state in the compliant beam, upon release of the compliant beam, the compliant beam bends into a rest position which is different than the pre-release position, wherein the rest position is based in part on the intended inherent stress state. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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Specification