×

Physical sensor

  • US 20090199637A1
  • Filed: 12/23/2008
  • Published: 08/13/2009
  • Est. Priority Date: 02/13/2008
  • Status: Active Grant
First Claim
Patent Images

1. A physical sensor for detecting a physical quantity comprising:

  • a substrate including a silicon layer, an oxide film and a support layer, which are stacked in this order; and

    a sensor portion includes a movable portion, a fixed portion and a lower electrode, wherein the movable portion and the fixed portion are disposed in the silicon layer, the movable portion includes a movable electrode, which is supported by a beam on the support layer, the fixed portion includes a fixed electrode facing the movable electrode, the lower electrode is disposed on the support layer, and the lower electrode faces the movable electrode via a space without the oxide film,wherein the physical sensor detects the physical quantity along with a first direction parallel to the substrate based on a capacitance between the movable electrode and the fixed electrode,wherein the physical sensor detects the physical quantity along with a second direction perpendicularly to the substrate based on a capacitance between the movable electrode and the lower electrode,wherein the beam includes a vertical beam displaceable along with the second direction and a horizontal beam displaceable along with the first direction,wherein the vertical beam has a thickness in the second direction, and the horizontal beam has a thickness in the second direction, andwherein the thickness of the vertical beam is smaller than the thickness of the horizontal beam.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×