DIFFERENTIAL FLUID PRESSURE MEASUREMENT APPARATUS
First Claim
1. A differential fluid pressure sensor apparatus comprising:
- a housing mounting a sense element module,the sense element module having first and second diaphragm mounting surfaces facing outwardly in a common direction,a passageway formed in the module and extending between and forming an opening inside each respective diaphragm mounting surface,a respective flexible metal diaphragm mounted on each diaphragm mounting surface over each opening,a pressure responsive sense element disposed in one of the openings of the passageway,a noncompressible fluid filling the passageway and engaging the diaphragms and sealed therein,electrical signal conditioning circuitry operatively connected to the pressure responsive sense element, andfirst and second fluid pressure connection means for presenting respective high and low fluid pressure to the flexible diaphragms for monitoring
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Accused Products
Abstract
A differential liquid pressure sensor (10) has an upper housing (12) that mounts a connector portion (12a) and receives in a recess a sense element module (14). The sense element module is a body in which a generally U-shaped oil filled passageway (14h) is formed with openings at opposite ends provided on respective first and second diaphragm mounting surfaces. A fluid pressure sense element, such as a piezoresistive sense element (15) is disposed in one of the passageway openings and flexible metal diaphragms (14a, 14b) are mounted on the respective diaphragm mounting surfaces of the module facing a common direction. A lower housing (18) having first and second port connections for the respective diaphragms is disposed on the lower surface of the module.
13 Citations
13 Claims
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1. A differential fluid pressure sensor apparatus comprising:
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a housing mounting a sense element module, the sense element module having first and second diaphragm mounting surfaces facing outwardly in a common direction, a passageway formed in the module and extending between and forming an opening inside each respective diaphragm mounting surface, a respective flexible metal diaphragm mounted on each diaphragm mounting surface over each opening, a pressure responsive sense element disposed in one of the openings of the passageway, a noncompressible fluid filling the passageway and engaging the diaphragms and sealed therein, electrical signal conditioning circuitry operatively connected to the pressure responsive sense element, and first and second fluid pressure connection means for presenting respective high and low fluid pressure to the flexible diaphragms for monitoring - View Dependent Claims (2, 3, 4, 5, 6)
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7. A differential fluid pressure sensor apparatus comprising:
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a housing, a sense element module mounted in the housing, the sense element mounting first and second metal diaphragm mounting discs, each disc having a planar diaphragm mounting surface, the first and second mounting surfaces facing a common direction, a window formed through each disc extending through the mounting surfaces, a passageway formed in the sense element module and extending between each respective window, a flexible metal diaphragm mounted in fluid sealed relation to and on each first and second mounting surface and extending over each respective window, noncompressible fluid filling the passageway and engaging the diaphragm and sealed in the passageway, a pressure responsive sense element disposed in pressure receiving communication within the passageway at the window of one disc and responsive to the difference in fluid pressure transmitted by the respective diaphragms, electrical signal conditioning circuitry operatively connected to the pressure responsive sense element, and first and second fluid pressure connections mounted on the housing in fluid communication with the respective first and second diaphragms. - View Dependent Claims (8, 9, 10, 11, 12, 13)
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Specification