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WIRING SUBSTRATE FOR ELECTRONIC-COMPONENT INSPECTION APPARATUS

  • US 20090200067A1
  • Filed: 02/02/2009
  • Published: 08/13/2009
  • Est. Priority Date: 02/04/2008
  • Status: Abandoned Application
First Claim
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1. A wiring substrate for an electronic-component inspection apparatus comprising:

  • a substrate body composed of a plurality of stacked ceramic layers, said substrate body having a front surface and a back surface; and

    front-surface terminal electrodes formed on the front surface of the substrate body, and grouped into unit inspection patterns, individual ones of the unit inspection patterns being constituted by a plurality of the front-surface terminal electrodes disposed so as to correspond to a plurality of terminal electrodes of individual electronic components to be inspected,wherein said unit inspection patterns are disposed so as to be offset distance-wise from a lattice arrangement in at least one of orthogonal first and second directions, as viewed from above the front surface of the substrate body.

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