METHODS FOR MEASUREMENT AND CHARACTERIZATION OF INTERFEROMETRIC MODULATORS
First Claim
1. A method of identifying a transition voltage in a microelectromechanical system (MEMS) device, the method comprising:
- applying a substantially constant source current to the MEMS device;
measuring a voltage across the MEMS device as a function of time;
determining the rate of change of the measured voltage; and
identifying a discontinuity in the rate of change of the measured voltage, wherein the voltage at which the discontinuity occurs corresponds to a transition voltage of the MEMS device.
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Accused Products
Abstract
Various methods are described to characterize interferometric modulators or similar devices. Measured voltages across interferometric modulators may be used to characterize transition voltages of the interferometric modulators. Measured currents may be analyzed by integration of measured current to provide an indication of a dynamic response of the interferometric modulator. Frequency analysis may be used to provide an indication of a hysteresis window of the interferometric modulator or mechanical properties of the interferometric modulator. Capacitance may be determined through signal correlation, and spread-spectrum analysis may be used to minimize the effect of noise or interference on measurements of various interferometric modulator parameters.
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Citations
27 Claims
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1. A method of identifying a transition voltage in a microelectromechanical system (MEMS) device, the method comprising:
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applying a substantially constant source current to the MEMS device; measuring a voltage across the MEMS device as a function of time; determining the rate of change of the measured voltage; and identifying a discontinuity in the rate of change of the measured voltage, wherein the voltage at which the discontinuity occurs corresponds to a transition voltage of the MEMS device. - View Dependent Claims (2, 3, 4)
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5. A method of identifying a transition voltage in a microelectromechanical system (MEMS) device, the method comprising:
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applying a substantially constant source current to the MEMS device; measuring a voltage across the MEMS device as a function of time; and identifying a beginning or end of a transition period in the measured voltage, wherein a voltage at which the transition period begins or ends corresponds to a transition voltage of the MEMS device. - View Dependent Claims (6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of determining a transition voltage of an interferometric modulator, the interferometric modulator comprising a movable electrode, a fixed electrode, and an optical stack, the method comprising:
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applying a source current to the interferometric modulator; measuring a voltage across the interferometric modulator as a function of time; and identifying a discontinuity in a rate of change of the measured voltage, wherein a voltage at which the discontinuity occurs corresponds to a transition voltage of the interferometric modulator.
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- 18. The method of claim 18, wherein the interferometric modulator is in a relaxed position without application of the constant source current, and the transition voltage corresponds to an actuation voltage of the interferometric modulator.
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20. A device, comprising:
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a microelectromechanical system (MEMS) device, and circuitry configured to apply a current to the MEMS device, measure a voltage across the MEMS device, identify a discontinuity in a rate of change of the measured voltage, and determine a transition voltage of the MEMS device based upon the identified discontinuity in the measured voltage. - View Dependent Claims (21, 22, 23, 24, 25, 26)
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27. A device, comprising:
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means for applying a source current to a microelectromechanical (MEMS) device; means for measuring a voltage across the MEMS device; and means for determining a transition voltage of the MEMS device based upon an identified discontinuity in the rate of change of the measured voltage.
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Specification