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Method and apparatus for inspecting an object using terahertz electromagnetic wave

  • US 20090201030A1
  • Filed: 04/13/2009
  • Published: 08/13/2009
  • Est. Priority Date: 04/28/2006
  • Status: Active Grant
First Claim
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1. An inspection apparatus, comprising:

  • a transmission line for propagating an electromagnetic wave;

    an electromagnetic wave supply unit for supplying the electromagnetic wave to the transmission line, the electromagnetic wave being included in a frequency range between 30 GHz and 30 THz;

    an electromagnetic wave detection unit for detecting the electromagnetic wave from the transmission line;

    a conductive region arranged in a site that includes at least a part of a range to which an electric field distribution of the electromagnetic wave propagating through the transmission line extends;

    an inspection object supply unit provided outside the transmission line for holding and supplying an inspection object to the transmission line; and

    a deposition unit for depositing the inspection object supplied from the inspection object supply unit selectively on the conductive region by an electrostatic force,wherein the electromagnetic wave that is supplied from the electromagnetic wave supply unit and is propagated through the transmission line is detected by the electromagnetic wave detection unit to obtain information on the inspection object,andwherein the deposition unit has a unit for generating an electric field by applying a voltage between an inspection object holding portion of the inspection object supply unit and the conductive region.

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