Utilities supply member connection apparatus, stage apparatus, projection optical system support apparatus and exposure apparatus

• US 20090201484A1
• Filed: 10/27/2008
• Published: 08/13/2009
• Est. Priority Date: 10/29/2007
• Status: Abandoned Application

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Arai, Dai
• Application Number:
  US12/289,377
• Publication Number:
  US 20090201484A1
• Time in Patent Office: Days
• US Class Current: 355/72
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: F16F 7/104 the inertia member being resiliently mounted F16F7/1022 takes precedence
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: G03F 7/70833 Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation
• CPC Class Codes: G03F 7/70991 Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum

Abstract

A connection apparatus for a utilities supply member, comprises: a holding part (41), a drive apparatus (43), a measuring apparatus (47), and a control apparatus. The holding part (41) is supported to freely move relative to a first member (CL) and holds a part of a utilities supply member (TB) connected between the first member (CL) and a second member (15). The drive apparatus moves the holding part (41) relative to the first member (CL). A measuring apparatus (47) obtains information relating to the relative position between the holding part (41) and the second member (15). The control apparatus controls the drive apparatus (43) based on the measurement results of the measuring apparatus (47).

Claims

1. A connection apparatus for a utilities supply member, comprising:

a holding part, which is supported to freely move relative to a first member and holds a part of the utilities supply member connected between the first member and a second member,

a drive apparatus, which moves the holding part relative to the first member,

a measuring apparatus, which obtains information relating to the relative position between the holding part and the second member, and

a control apparatus, which controls the drive apparatus based on the measurement results of the measuring apparatus.

2. A connection apparatus according to claim 1, wherein the first member comprises a main body part and a mass body, which is connected to the main body part via an elastic body, and holds another part of the utilities supply member.

3. A connection apparatus according to claim 2, wherein the mass body has a manifold apparatus or a cable connector, which relays the utilities supply member.

4. A connection apparatus according to claim 1, wherein the drive apparatus drives the holding part so as to maintain the relative position with respect to the second member.

5. A connection apparatus according to claim 1, wherein the drive apparatus drives the holding part with six degrees of freedom.

6. A connection apparatus according to claim 5, further comprising:

a support apparatus, which is provided in a hanging manner on the first member and has an urging force corresponding to the dead load of the holding part to support the holding part.

7. A connection apparatus according to claim 6, wherein the support apparatus has a cylinder part, which is linked to the first member, and a piston part, which is linked to the holding part, at least part of the piston part being inserted into the interior of the cylinder part, and the piston part being movable relative to the cylinder part.

8. A connection apparatus according to claim 6, wherein the support apparatus has an elastic member whose one end is connected to the first member and whose other end is connected to the holding part.

9. A connection apparatus according to claim 8, wherein the characteristic frequency of a vibration system formed by the elastic member and the holding part is smaller than the response frequency of the drive apparatus.

10. A connection apparatus according to claim 1, wherein the drive apparatus drives the holding part without contact.

11. A connection apparatus according to claim 1, wherein the second member is supported by the first member via a vibration isolating apparatus.

12. A stage apparatus comprising:

a base frame, which supports a base member;

a movable stage, which moves above the base member; and

a connection apparatus according to claim 1, which is for connecting a utilities supply member between the base frame and the base member.

13. A stage apparatus comprising:

a movable stage;

a substage, which moves synchronously with the movable stage; and

a connection apparatus according to claim 1, which is for connecting a utilities supply member between the movable stage and the substage.

14. A support apparatus of a projection optical system, comprising:

a base member, which supports the projection optical system;

a base frame, which supports the base member; and

a connection apparatus according to claim 1, which is for connecting a utilities supply member between the base frame and the base member.

15. An exposure apparatus that comprises a stage apparatus according to claim 12.

16. An exposure apparatus that comprises a stage apparatus according to claim 13.

17. An exposure apparatus that comprises a support apparatus according to claim 14.