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Utilities supply member connection apparatus, stage apparatus, projection optical system support apparatus and exposure apparatus

  • US 20090201484A1
  • Filed: 10/27/2008
  • Published: 08/13/2009
  • Est. Priority Date: 10/29/2007
  • Status: Abandoned Application
First Claim
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1. A connection apparatus for a utilities supply member, comprising:

  • a holding part, which is supported to freely move relative to a first member and holds a part of the utilities supply member connected between the first member and a second member,a drive apparatus, which moves the holding part relative to the first member,a measuring apparatus, which obtains information relating to the relative position between the holding part and the second member, anda control apparatus, which controls the drive apparatus based on the measurement results of the measuring apparatus.

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