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DEVICE HAVING A CONDUCTIVE LIGHT ABSORBING MASK AND METHOD FOR FABRICATING SAME

  • US 20090201566A1
  • Filed: 04/17/2009
  • Published: 08/13/2009
  • Est. Priority Date: 09/27/2004
  • Status: Active Grant
First Claim
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1. An optical device comprising:

  • a substrate;

    a light modulating element disposed on the substrate, the modulating element comprising a movable reflective layer and a non-movable partially reflective layer, the movable layer configured to move between a driven state and an undriven state in response to a voltage applied to the modulating element; and

    an electrically-conductive mask disposed on a portion of the substrate to mask a portion of the light modulating element and electrically coupled to the modulating element to provide one or more electrical paths for applying voltages to the modulating element, the mask comprising a non-movable reflective layer, a non-movable partially reflective layer, and an interferometric cavity defined by the reflective layer and the partially reflective layer.

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