Array and cantilever array leveling

• US 20090205091A1
• Filed: 02/05/2009
• Published: 08/13/2009
• Est. Priority Date: 02/05/2008
• Status: Active Grant

• Current Assignee: NanoInk, Inc.
• Original Assignee: NanoInk, Inc.
• Inventors: Val-Khavalabov, Vadim, Haaheim, Jason
• Granted Patent: US 8,256,018 B2
• Time in Patent Office: Days
• US Class Current: 850/33
• CPC Class Codes: G01Q 70/06 Probe tip arrays
• CPC Class Codes: G01Q 80/00 Applications, other than SPM, of scanning-probe techniques manufacture or treatment of nanostructures B82B3/00; recording or reproducing information using near-field interaction G11B9/12, G11B11/24, G11B13/08
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: G03F 9/7034 Leveling

Abstract

Faster and better methods for leveling arrays including software and user interface for instruments. A method comprising: (i) providing at least one array of cantilevers supported by at least one support structure, (ii) providing at least one substrate, (iii) providing at least one instrument to control the position of the array with respect to the substrate, (iv) leveling the array with respect to the substrate, wherein the leveling is performed via a user interface on the instrument which is adapted to have the user input positional information from the motors and piezoelectric extender when at least one cantilever deflects from the substrate. Uniform z-displacements can be achieved.

Claims

1. A method comprising:

providing at least one array of cantilevers supported by at least one support structure,

providing at least one substrate,

providing at least one instrument comprising motors and a piezoelectric extender to control the position of the array with respect to the substrate,

leveling the array with respect to the substrate,

wherein the leveling is carried out via a user interface on the instrument which is adapted to have a user input positional information from the motors and piezoelectric extender when at least one cantilever deflects from the substrate.

2. The method according to claim 1, wherein the array is a one dimensional array of cantilevers.

3. The method according to claim 1, wherein the array is a two dimensional array of cantilevers.

4. The method according to claim 1, wherein the array comprises at least 250 cantilevers.

5. The method according to claim 1, wherein the array comprises at least 10,000 cantilevers.

6. The method according to claim 1, wherein the array comprises at least 55,000 cantilevers.

7. The method according to claim 1, wherein the cantilevers are bent at an angle away from the support structure.

8. The method according to claim 1, wherein the cantilevers are bent at an angle of at least 5°

away from the support structure.

9. The method according to claim 1, wherein at least some of the cantilevers comprise tips.

10. The method according to claim 1, wherein at least some of the cantilevers do not comprise tips.

11. The method according to claim 1, wherein the cantilevers comprise tips adapted for transferring materials from the tips to the substrate surface.

12. The method according to claim 1, wherein the cantilevers comprise tips adapted for AFM measurements.

13. The method according to claim 1, wherein the cantilevers comprise tips adapted for lithography.

14. The method according to claim 1, wherein the support structure comprises silicon.

15. The method according to claim 1, wherein the support structure is a silicon support structure.

16. The method according to claim 1, wherein the support structure comprises at least one viewport adapted to allow viewing of the cantilevers.

17. The method according to claim 1, wherein the support structure comprises at least one edge standoff spacer.

18. The method according to claim 1, wherein the support structure comprises gold adapted to support the array of cantilevers to the support structure.

19. The method according to claim 1, wherein the support structure comprises at least three viewports adapted to allow viewing of at least some of the cantilevers.

20. The method according to claim 1, wherein the support structure comprises at least one viewport adapted to allow viewing of the cantilevers, and the viewport comprises sloping walls.

21. The method according to claim 1, wherein the substrate is flat.

22. The method according to claim 1, wherein the substrate is not flat.

23. The method according to claim 1, wherein the substrate is at least one cm long and at least one cm wide.

24. The method according to claim 1, wherein the leveling results in the differences between the relative positions of the viewports being less than about 500 nm.

25. The method according to claim 1, wherein the leveling results in partial extension of at least one z-axis piezoelectric extender.

26. The method according to claim 1, wherein the instrument comprises at least one z-axis piezoelectric extender.

27. The method according to claim 1, wherein the positional information is obtained via at least three viewports.

28. The method according to claim 1, wherein the motors are z-axis motors.

29. The method according to claim 1, wherein the motors are goiniometer motors.

30. The method according to claim 1, wherein the piezoelectric extender is partially extended during the leveling.

31. A method comprising:

providing at least one array of cantilevers supported by at least one support structure comprising at least one viewport,

providing at least one substrate,

providing at least one instrument to control the position of the array with respect to the substrate,

leveling the array with respect to the substrate,

wherein the leveling is performed with the instrument comprising software further comprising a user interface adapted to provide operational control and iterative measurements of differences between the relative positions of the viewports with respect to the substrate.

32. The method according to claim 31, wherein the array is a one dimensional array of cantilevers.

33. The method according to claim 31, wherein the array is a two dimensional array of cantilevers.

34. The method according to claim 31, wherein the array comprises at least 250 cantilevers.

35. The method according to claim 31, wherein the array comprises at least 10,000 cantilevers.

36. The method according to claim 31, wherein the array comprises at least 55,000 cantilevers.

37. The method according to claim 31, wherein the cantilevers are bent at an angle away from the support structure.

38. The method according to claim 31, wherein the cantilevers are bent at an angle of at least 5°

away from the support structure.

39. The method according to claim 31, wherein at least some of the cantilevers comprise tips.

40. The method according to claim 31, wherein at least some of the cantilevers do not comprise tips.

41. The method according to claim 31, wherein the cantilevers comprise tips adapted for transferring materials from the tips to the substrate surface.

42. The method according to claim 31, wherein the cantilevers comprise tips adapted for AFM measurements.

43. The method according to claim 31, wherein the cantilevers comprise tips adapted for lithography.

44. The method according to claim 31, wherein the support structure comprises silicon.

45. The method according to claim 31, wherein the support structure is a silicon support structure.

46. The method according to claim 31, wherein the support structure comprises at least one viewport adapted to allow viewing of the cantilevers.

47. The method according to claim 31, wherein the support structure comprises at least one edge standoff spacer.

48. The method according to claim 31, wherein the support structure comprises gold adapted to support the array of cantilevers to the support structure.

49. The method according to claim 31, wherein the support structure comprises at least three viewports adapted to allow viewing of at least some of the cantilevers.

50. The method according to claim 31, wherein the support structure comprises at least one viewport adapted to allow viewing of the cantilevers, and the viewport comprises sloping walls.

51. The method according to claim 31, wherein the substrate is flat.

52. The method according to claim 31, wherein the substrate is not flat.

53. The method according to claim 31, wherein the substrate is at least one cm long and at least one cm wide.

54. The method according to claim 31, wherein the leveling results in the differences between the relative positions of the viewports being less than about 500 nm.

55. The method according to claim 31, wherein the leveling results in partial extension of at least one z-axis piezoelectric extender.

56. The method according to claim 31, wherein the instrument comprises at least one z-axis piezoelectric extender.

57. The method according to claim 31, wherein the software monitors and controls at least one z-axis piezoelectric extender and at least three z-axis motors.

58. The method according to claim 31, wherein the software monitors and controls at least one z-axis piezoelectric extender or at least two goiniometer motors.

59. The method according to claim 31, wherein the software is adaptable for future modifications.

60. The method according to claim 31, wherein the user interface prompts the operator for inputs.

61. A method comprising:

providing at least one array of cantilevers,

providing at least one substrate,

providing at least one instrument to control the position of the array,

leveling the array with respect to the substrate,

wherein the instrument comprises at least one piezoelectric extender and at least three motors, wherein the piezoelectric extender and the motors are adapted to provide the leveling of the array.

62. The method according to claim 61, wherein the array is one dimensional.

63. The method according to claim 61, wherein the array is two dimensional.

64. The method according to claim 61, wherein the substrate is flat.

65. The method according to claim 61, wherein the substrate is not flat.

66. The method according to claim 61, wherein the substrate is at least one cm wide and at least one cm long.

67. The method according to claim 61, wherein the leveling is performed using partial extension of the piezoelectric extender.

68. The method according to claim 61, wherein the piezoelectric extender and the motors are controlled and monitored by a software.

69. The method according to claim 61, wherein the substrate is a biological molecule.

70. The method according to claim 61, wherein the position is monitored by at least one viewport.

71. A method comprising:

providing at least one array of cantilevers comprising cantilever tips,

providing at least one substrate,

wherein the position of the array of cantilever tips with respect to the substrate is controlled by at least one z-piezoelectric extender and at least three z-axis motors in a triangular, surrounding relationship with respect to the array,

wherein the z-axis motors are adapted to raise and lower the cantilever tips with respect to the substrate,

adjusting the z-axis motors until all the cantilever tips are substantially level with respect to the substrate to an unaided eye,

positioning the array so that the cantilevers deflect by a non-negligible amount while fully extending the z-piezoelectric extender,

adjusting the z-piezoelectric extender to determine the relative position of the z-axis motors, and

recording the positions for future calibration reference so that the method needs to be performed once.

72. A method comprising:

providing at least one surface with topographical features,

providing at least one substrate,

providing at least one instrument to control the position of the features,

leveling the array with respect to the substrate,

wherein the instrument is adapted to provide leveling of the surface by a software routine adapted to provide iterative measurements of the positions of the array.

73. A method of leveling comprising:

providing at least one surface with topographical features,

providing at least one substrate,

providing at least one instrument to control the spatial position of the array,

leveling the array with respect to the substrate,

wherein the instrument comprises at least one piezoelectric extender and at least three motors adapted to provide the leveling of the array.

74. A method comprising:

providing at least one surface with topographical features,

providing v substrate,

wherein the position of the features with respect to the substrate is controlled by at least piezoelectric extender and at least three motors in a triangular, surrounding relationship with respect to the surface,

wherein the motors are adapted to raise and lower the features with respect to the substrate,

adjusting the motors until all the features are substantially level with respect to the substrate to an unaided eye,

positioning the array so that the surface features touch the substrate by a non negligible amount,

adjusting the piezoelectric extender to determine the relative position of the motors, and

recording the positions for future calibration references so that the method needs to be performed once.

75. A software routine comprising a user interface, wherein the routine prompts a user to perform measurements and input measurement results via the interface, the routine performs calculations based on the results and controls and monitors at least one piezoelectric extender and at least three motors to provide leveling of a device with respect of a substrate.

77. The software routine according to claim 75, wherein the device comprises one dimensional or two dimensional array of cantilevers.

78. The software routine according to claim 75, wherein the software routine controls and monitors at least one piezoelectric extender and at least three motors.

79. The software routine according to claim 75, wherein the leveling results in a maximum deviation from planarity of 500 nm in z-height.

80. The software routine according to claim 75, wherein the leveling is performed using partial extension of the piezoelectric extender.

76. A software routine comprising a user interface, wherein the routine can be adapted to perform automated measurements and iterative calculations and controls and monitors at least one piezoelectric extender and at least three motors to provide leveling of a device with respect of a substrate.

81. A method comprising:

providing at least one array of cantilevers supported by at least one support structure,

providing at least one substrate,

providing at least one instrument comprising motors to control the position of the array with respect to the substrate,

leveling the array with respect to the substrate,

wherein the leveling step is carried out via a user interface on the instrument which is adapted to have the user input positional information for the motors when at least one cantilever deflects from the substrate.

82. A method comprising:

(i) providing at least one array of tips,

(ii) providing at least one substrate,

(iii) providing at least one instrument to control the position of the array of tips with respect to the substrate,

(iv) leveling the array with respect to the substrate, wherein the leveling is performed via a user interface on the instrument which is adapted to have the user input positional information from at least one motor and at least one piezoelectric extender when at least one tip contacts the substrate.

83. A method comprising:

providing at least one array of nanoscopic tips supported by at least one support structure,

providing at least one substrate,

providing at least three points of reference in X-Y plane with respect to the substrate to determine points of contact between tips and substrate,

providing at least one instrument comprising motors and a piezoelectric extender to control the position of the array with respect to the substrate,

leveling the array with respect to the substrate,

wherein the leveling is carried out via a user interface on the instrument which is adapted to have a user input positional information from the motors and piezoelectric extender when at least one nanoscopic tip contacts the surface.