SOLID-STATE SWITCH CAPABLE OF BIDIRECTIONAL OPERATION

• US 20090206363A1
• Filed: 02/19/2009
• Published: 08/20/2009
• Est. Priority Date: 02/20/2008
• Status: Active Grant

• Current Assignee: Sanken Electric Company Limited
• Original Assignee: Sanken Electric Company Limited
• Inventors: Machida, Osamu, Tsuruya, Mamoru
• Granted Patent: US 7,868,353 B2
• Time in Patent Office: Days
• US Class Current: 257/133
• CPC Class Codes: H01L 27/0727 in combination with diodes, or capacitors or resistors
• CPC Class Codes: H01L 29/2003 Nitride compounds
• CPC Class Codes: H01L 29/42316 for field-effect transistors
• CPC Class Codes: H01L 29/7787 with wide bandgap charge-carrier supplying layer, e.g. direct single heterostructure MODFET
• CPC Class Codes: H01L 29/8124 with multiple gate

Abstract

A monolithic switching device including a main semiconductor region configured to provide a current-carrying channel as in the form of two-dimensional electron gas. Disposed symmetrically on a surface of the main semiconductor region are two main electrodes to be coupled to an electric circuit for switching control, two gate electrodes for individually controlling current flow between the main electrodes through the current-carrying channel, and two diode-forming electrodes electrically connected respectively to the two main electrodes. The device operates in either Switch On Mode, Switch Off Mode, Negative Current Mode, or Positive Current Mode depending upon voltages applied to the two gate electrodes.

Claims

1. A solid-state switching device for on-off control of electric circuits, the switching device comprising:

(a) a main semiconductor region for providing a current-carrying channel therein, the main semiconductor region having a first and a second opposite major surface;

(b) a first and a second main electrode disposed in spaced-apart positions on the first major surface of the main semiconductor region in ohmic contact therewith;

(c) first and second gate means disposed in spaced-apart positions between the first and the second main electrode on the first major surface of the main semiconductor region for individually controlling current flow between the first and the second main electrode through the current-carrying channel in the main semiconductor region;

(d) a first and a second diode-forming electrode disposed between the first and the second gate means on the first major surface of the main semiconductor region;

(e) a first conductor electrically connecting the first diode-forming electrode to the first main electrode; and

(f) a second conductor electrically connecting the second diode-forming electrode to the second main electrode.

2. A solid-state switching device as set forth in claim 1, further comprising:

(a) a substrate of electroconductive material held against the second major surface of the main semiconductor region;

(b) a first potential stabilizer switch connected between the substrate and the first main electrode, the first potential stabilizer switch becoming nonconductive in response to a first voltage applied between the first and the second main electrode, and conductive in response to a second voltage applied between the first and the second main electrode, the first voltage being such that the first main electrode is higher in potential than the second main electrode, the second voltage being such that the first main electrode is less in potential than the second main electrode; and

(c) a second potential stabilizer switch connected between the substrate and the second main electrode, the second potential stabilizer switch becoming conductive in response to the first voltage applied between the first and the second main electrode, and nonconductive in response to the second voltage applied between the first and the second main electrode.

3. A solid-state switching device as set forth in claim 2, wherein the first and the second potential stabilizer switch are both controllable semiconductor devices, and wherein the solid-state switching device further comprises:

(a) first control means connected to the first potential stabilizer switch for causing conduction therethrough in response to the application of the first voltage between the first and the second main electrode; and

(b) second control means connected to the second potential stabilizer switch for causing conduction therethrough in response to the application of the second voltage between the first and the second main electrode.

4. A solid-state switching device as set forth in claim 1, further comprising:

(a) a substrate of electroconductive material held against the second major surface of the main semiconductor region;

(b) a first potential stabilizer diode-forming electrode disposed opposite the first gate means across the first main electrode on the first major surface of the main semiconductor region for forming a first potential stabilizer diode;

(c) a second potential stabilizer diode-forming electrode disposed opposite the second gate means across the second main electrode on the first major surface of the main semiconductor region for forming a second potential stabilizer diode;

(d) a third conductor electrically connecting the first potential stabilizer diode-forming electrode to the substrate; and

(e) a fourth conductor electrically connecting the second potential stabilizer diode-forming electrode to the substrate;

(f) the first potential stabilizer diode becoming nonconductive in response to a first voltage applied between the first and the second main electrode, and conductive in response to a second voltage applied between the first and the second main electrode, the first voltage being such that the first main electrode is higher in potential than the second main electrode, the second voltage being such that the first main electrode is less in potential than the second main electrode;

(g) the second potential stabilizer diode becoming conductive in response to the first voltage applied between the first and the second main electrode and nonconductive in response to the second voltage applied between the first and the second main electrode.

5. A solid-state switching device as set forth in claim 1, further comprising:

(a) a substrate of electroconductive material held against the second major surface of the main semiconductor region;

(b) a third main electrode disposed opposite the first gate means across the first main electrode on the first major surface of the main semiconductor region for forming a first potential stabilizer switch;

(c) third gate means disposed between the first and the third main electrode on the first major surface of the main semiconductor region for controlling current flow between the first and the third main electrode through the current-carrying channel in the main semiconductor region;

(d) a fourth main electrode disposed opposite the second gate means across the second main electrode on the first major surface of the main semiconductor region for forming a second potential stabilizer switch;

(e) fourth gate means disposed between the second and the fourth main electrode on the first major surface of the main semiconductor region for controlling current between the second and the fourth main electrode through the current-carrying channel in the main semiconductor region;

(f) a third conductor electrically connecting the third main electrode to the substrate;

(g) a fourth conductor electrically connecting the fourth main electrode to the substrate;

(h) first gate control means connected to the third gate means for causing nonconduction between the first and the third main electrode in response to the application of a first voltage between the first and the second main electrode, and conduction between the first and the third main electrode in response to the application of a second voltage between the first and the second main electrode, the first voltage being such that the first main electrode is higher in potential than the second main electrode, the second voltage being such that the first main electrode is less in potential than the second main electrode; and

(i) second gate control means connected to the fourth gate means for causing conduction between the second and the fourth main electrode in response to the application of the first voltage between the first and the second main electrode, and nonconduction between the second and the fourth main electrode in response to the application of the second voltage between the first and the second main electrode.

6. A solid-state switching device as set forth in claim 1, further comprising:

(a) a first gate control circuit connected between the first main electrode and the first gate means; and

(b) a second gate control circuit connected between the second main electrode and the second gate means.

7. A solid-state switching device as set forth in claim 1, wherein the main semiconductor region comprises two layers of different compositions such that two-dimensional carrier gas is generated as the current-carrying channel.

8. A solid-state switching device as set forth in claim 1, wherein the main semiconductor region has a layer of a prescribed conductivity type as the current-carrying channel.

9. A solid-state switching device as set forth in claim 1, wherein each of the first and the second gate means comprises an electrode in schottky contact with the main semiconductor region, and wherein the first and the second diode-forming electrode are in schottky contact with the main semiconductor region.

10. A solid-state switching device as set forth in claim 1, wherein each of the first and the second gate means comprises:

(a) a gate insulator on the first major surface of the semiconductor region; and

(b) a gate electrode on the gate insulator.

11. A solid-state switching device as set forth in claim 1, wherein the main semiconductor region comprises a semiconductor layer of a first conductivity type itself capable of providing the current-carrying channel, and a first and a second pn-junction-forming layer formed on the semiconductor layer, the pn-junction-forming layers being made from a semiconductor of a second conductivity type, and wherein the first and the second gate means comprise a first and a second gate electrode disposed respectively on the first and the second pn-junction-forming layer in ohmic contact therewith.

12. A solid-state switching device for on-off control of electric circuits, the switching device comprising:

(a) a substrate of electroconductive material;

(b) a main semiconductor region formed on the substrate for providing a current-carrying channel;

(c) a first and a second main electrode disposed in spaced-apart positions on a first major surface of the main semiconductor region in ohmic contact therewith;

(d) first and second gate means disposed in spaced-apart positions between the first and the second main electrode on the first major surface of the main semiconductor region for individually controlling current flow between the first and the second main electrode through the current-carrying channel in the main semiconductor region;

(e) a first potential stabilizer switch connected between the substrate and the first main electrode, the first potential stabilizer switch becoming nonconductive in response to a first voltage applied between the first and the second main electrode, and conductive in response to a second voltage applied between the first and the second main electrode, the first voltage being such that the first main electrode is higher in potential than the second main electrode, the second voltage being such that the first main electrode is less in potential than the second main electrode; and

(f) a second potential stabilizer switch connected between the substrate and the second main electrode, the second potential stabilizer switch becoming conductive in response to the first voltage applied between the first and the second main electrode, and nonconductive in response to the second voltage applied between the first and the second main electrode.

13. A solid-state switching device as set forth in claim 12, wherein the first and the second potential stabilizer switch are both controllable semiconductor devices, and wherein the solid-state switching device further comprises:

(a) first control means connected to the first potential stabilizer switch for causing conduction therethrough in response to the application of the second voltage between the first and the second main electrode; and

(b) second control means connected to the second potential stabilizer switch for causing conduction therethrough in response to the application of the first voltage between the first and the second main electrode.

14. A solid-state switching device for on-off control of electric circuits, the switching device comprising:

(a) a substrate of electroconductive material;

(b) a main semiconductor region formed on the substrate for providing a current-carrying channel;

(c) a first and a second main electrode disposed in spaced-apart positions on a first major surface of the main semiconductor region in ohmic contact therewith;

(d) first and second gate means disposed in spaced-apart positions between the first and the second main electrode on the first major surface of the main semiconductor region for individually controlling current flow between the first and the second main electrode through the current-carrying channel in the main semiconductor region;

(e) a first potential stabilizer diode-forming electrode disposed opposite the first gate means across the first main electrode on the first major surface of the main semiconductor region for forming a first potential stabilizer diode;

(f) a second potential stabilizer diode-forming electrode disposed opposite the second gate means across the second main electrode on the first major surface of the main semiconductor region for forming a second potential stabilizer diode;

(g) a conductor electrically connecting the first potential stabilizer diode-forming electrode to the substrate; and

(h) another conductor electrically connecting the second potential stabilizer diode-forming electrode to the substrate;

(i) the first potential stabilizer diode being oppositely polarized with respect to the second potential stabilizer diode between the first and the second main electrode.

15. A solid-state switching device for on-off control of electric circuits, the switching device comprising:

(a) a substrate of electroconductive material;

(b) a main semiconductor region formed on the substrate for providing a current-carrying channel;

(c) a first and a second main electrode disposed in spaced-apart positions on a first major surface of the main semiconductor region in ohmic contact therewith;

(d) first and second gate means disposed in spaced-apart positions between the first and the second main electrode on the first major surface of the main semiconductor region for individually controlling current flow between the first and the second main electrode through the current-carrying channel in the main semiconductor region;

(e) a third main electrode disposed opposite the first gate means across the first main electrode on the first major surface of the main semiconductor region for forming a first potential stabilizer switch;

(f) third gate means disposed between the first and the third main electrode on the first major surface of the main semiconductor region for controlling current flow between the first and the third main electrode through the current-carrying channel in the main semiconductor region;

(g) a fourth main electrode disposed opposite the second gate means across the second main electrode on the first major surface of the main semiconductor region for forming a second potential stabilizer switch;

(h) fourth gate means disposed between the second and the fourth main electrode on the first major surface of the main semiconductor region for controlling current between the second and the fourth main electrode through the current-carrying channel in the main semiconductor region;

(i) a conductor electrically connecting the third main electrode to the substrate;

j) another conductor electrically connecting the fourth main electrode to the substrate,

(k) first gate control means connected to the third gate means for causing nonconduction between the first and the third main electrode in response to the application of a first voltage between the first and the second main electrode, and conduction between the first and the third main electrode in response to the application of a second voltage between the first and the second main electrode, the first voltage being such that the first main electrode is higher in potential than the second main electrode, the second voltage being such that the first main electrode is less in potential than the second main electrode; and

(l) second gate control means connected to the fourth gate means for causing conduction between the second and the fourth main electrode in response to the application of the first voltage between the first and the second main electrode, and nonconduction between the second and the fourth main electrode in response to the application of the second voltage between the first and the second main electrode.