Stage device, exposure apparatus and method of producing device

• US 20090207394A1
• Filed: 12/16/2008
• Published: 08/20/2009
• Est. Priority Date: 12/17/2007
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Shibazaki, Yuichi
• Granted Patent: US 8,964,166 B2
• Time in Patent Office: Days
• US Class Current: 355/53
• CPC Class Codes: G03F 7/707 Chucks, e.g. chucking or un-chucking operations or structural details
• CPC Class Codes: G03F 7/70875 Temperature, e.g. temperature control of masks or workpieces via control of stage temperature

Abstract

A stage device is provided with a mobile body retaining a mask illuminated with exposure light and moving along a predetermined plane, and a flow control section moving substantially together with the movement of the mobile body so as to control the flow of gas in proximity to the mask thereby.

Claims

1. A stage device comprising:

a mobile body that retains a mask illuminated with exposure light and moves along a predetermined plane; and

a flow control section that moves substantially together with the movement of the mobile body and thereby controls a flow of gas in a vicinity of the mask.

2. The stage device according to claim 1, wherein gas is directed towards the mask by the flow control section during movement.

3. The stage device according to claim 1, wherein the flow control section is provided in at least one of a forward position and a rearward position of the mask in a movement direction of the mobile body.

4. The stage device according to claim 1, wherein exchange of gas in the vicinity of the mask is promoted by the flow control section.

5. The stage device according to claim 1, wherein gas flow is promoted at least towards the mask by the flow control section forward of the mask in a movement direction of movement of the mobile body.

6. The stage device according to claim 1, wherein gas flow is promoted at least away from the mask by the flow control section in a rearward position of the mask in a movement direction of movement of the mobile body.

7. The stage device according to claim 1, wherein the flow control section is disposed adjacent to a pattern forming face, or the side opposite thereto, of the mask in a direction intersecting with the predetermined plane.

8. The stage device according to claim 1, wherein the flow control section has a control face that controls at least the direction of gas flow.

9. The stage device according to claim 8, wherein at least a part of the control face inclines with respect to the predetermined plane.

10. The stage device according to claim 1, wherein the flow control section forms a passage along at least a movement direction of the mobile body by singly or in combination with other member.

11. The stage device according to claim 10, wherein the position of at least a part of the passage in a direction which intersects with the predetermined plane differs from the corresponding position of the mask.

12. The stage device according to claim 10, wherein at least a section of the passage has an inclination approaching the mask along a direction which intersects with the predetermined plane as the mask is approached along the predetermined plane.

13. The stage device according to claim 1, wherein the flow control section has a turbulence producing section that creates turbulence in the flow of gas.

14. The stage device according to claim 1, wherein an inner section of the mobile body has a recess into which the mask is disposed.

15. An exposure apparatus provided with the stage device according to claim 1, wherein the exposure apparatus exposes a substrate with exposure light from the mask.

16. The exposure apparatus according to claim 15, wherein the substrate is exposed via the mask using a step-and-scan method and the mask undergoes reciprocating movement in a direction parallel to the predetermined plane during the exposure of the substrate.

17. A method of manufacturing a device comprising:

exposing a substrate using an exposure apparatus according to claim 15; and

developing the exposed substrate.

18. A stage device comprising:

a mobile member that has a retaining section, which retains a mask illuminated with exposure light, and moves along a predetermined plane including an illumination position of the exposure light while holding the mask, and

an intake structure that comprises an intake port, a first gas passage, and a supply port, the intake port into which gas is taken, the first gas passage in which the gas taken via the intake port flows, the supply port that supplies gas flowing from the first gas passage to a surface of the mask retained on the retaining section.

19. The stage device according to claim 18, wherein the intake structure is disposed on the mobile member.

20. The stage device according to claim 18, wherein the intake structure moves in synchrony with the mobile member.

21. The stage device according to claim 18, wherein the supply port is disposed at least a part of a periphery of the retaining section.

22. The stage device according to claim 18, wherein the supply port is disposed at a position differing from the surface of the mask in a direction which is substantially perpendicular to the surface of the mask.

23. The stage device according to claim 18, wherein the supply port supplies gas from a direction oblique with respect to the surface of the mask.

24. The stage device according to claim 18, wherein the supply port is disposed lateral to the surface of the mask in the predetermined plane.

25. The stage device according to claim 18, wherein

the mobile member has a first face disposed at a periphery of the retaining section and

at least a part of the intake structure is disposed at a position opposite the first face.

26. The stage device according to claim 25, wherein the first face is substantially parallel to the surface of the mask retained on the retaining section.

27. The stage device according to claim 25, wherein the supply port is disposed far from the surface of the mask than the first face.

28. The stage device according to claim 25, wherein the surface of the mask retained on the retaining section is closer to the center of the mobile member than the first surface in a first direction substantially perpendicular to the predetermined plane.

29. The stage device according to claim 18, wherein the mobile member has a recessed portion and the retaining section is disposed in the recessed portion.

30. The stage device according to claim 29, wherein the surface of the mask retained on the retaining section is disposed inside the recessed portion.

31. The stage device according to claim 29, wherein

the surface of the mobile member is disposed at the periphery of the recessed portion, and

the surface of the mask is closer to the center of the mobile member than the surface of the mobile member in a direction which is substantially perpendicular to the surface of the mask retained on the retaining section.

32. The stage device according to claim 18, further comprising:

a second face that is disposed outside the intake structure with respect to the retaining section and is illuminated with measuring light for measuring positional information of the mobile member.

33. The stage device according to claim 18, wherein the intake structure comprises a nozzle member on which an intake port, a first gas passage and a supply port are provided.

34. The stage device according to claim 33, wherein the nozzle member is fixed to a predetermined position with reference to the mobile member.

35. The stage device according to claim 33, further comprising:

a drive device that is capable of moving the nozzle member to adjust a positional relationship between the mobile member and the nozzle member.

36. The stage device according to claim 18, wherein the intake structure comprises a passage formation member that can form at least a part of the intake port, the first gas passage and the supply port with the mobile member.

37. The stage device according to claim 36, further comprising:

a drive device that can move the passage formation member to adjust the positional relationship between the mobile member and the passage formation member.

38. The stage device according to claim 18, wherein at least a part of the intake structure is formed in the mobile member.

39. The stage device according to claim 18, wherein

the mobile member moves in a second direction in the predetermined plane and

the intake port is disposed forward of the moving mask in the second direction.

40. The stage device according to claim 18, wherein

the mobile member moves in a second direction in the predetermined plane and

the intake structure is disposed respectively at both sides of the mask in the second direction.

41. The stage device according to claim 18, wherein the intake port is larger than the supply port.

42. The stage device according to claim 18, wherein the first gas passage gradually narrows from the intake port towards the supply port

43. The stage device according to claim 18, wherein the supply port is formed as a slit with a width which is substantially equal to the mask or larger than the width of the mask.

44. The stage device according to claim 18, wherein the intake structure comprises a turbulence producing mechanism by which turbulence is produced in gas supplied from the supply port.

45. The stage device according to claim 44, wherein the turbulence producing mechanism comprises a plurality of minute members disposed on at least a part between the intake port and the supply port.

46. The stage device according to claim 44, wherein the turbulence producing mechanism comprises a porous member disposed at least a part between the intake port and the supply port.

47. The stage device according to claim 18, wherein the supply port supplies gas towards a face other than the pattern forming face of the mask.

48. The stage device according to claim 18, wherein the supply port supplies gas toward the pattern forming face of the mask.

49. The stage device according to claim 18, further comprising:

an outlet structure that comprises an inflow port into which at least a part of the gas flowing over the surface of the mask flows, a second gas passage in which gas flowing from the inflow port flows, and an outlet port from which gas from the second gas passage flows out.

50. The stage device according to claim 49, wherein the outlet structure is disposed on the mobile member.

51. The stage device according to claim 49, wherein the outlet structure moves synchronously with the mobile member.

52. The stage device according to claim 44, wherein the inflow port is disposed at least a part of the periphery of the retaining section.

80. An exposure apparatus that illuminates a mask with exposure light and exposes a substrate with the exposure light via the mask, the exposure apparatus comprises the stage device according to claim 18.

81. A method of producing a device comprising

exposing a substrate using the exposure apparatus according to claim 80 and

developing the exposed substrate.

53. A stage device comprising:

a mobile member that has a retaining section, which retains a mask illuminated with exposure light, and moves along a predetermined plane including an illumination position of the exposure light while holding the mask, and

an outlet structure that comprises an inflow port into which at least part of the gas flowing over the surface of the mask flows, a second gas passage in which gas from the inflow port flows, and a outlet port from which gas flowing from the second gas passage flows out.

54. The stage device according to claim 53, wherein the outlet structure is disposed on the mobile member.

55. The stage device according to claim 53, wherein the outlet structure moves in synchrony with the mobile member.

56. The stage device according to claim 53, wherein the inflow port is disposed at least a part of the periphery of the retaining section.

57. The stage device according to claim 53, wherein the inflow port is disposed at a position differing from the surface of the mask in a direction which is substantially perpendicular to the surface of the mask.

58. The stage device according to claim 53, wherein the inflow port is disposed in a direction oblique with respect to the surface of the mask.

59. The stage device according to claim 53, wherein the inflow port is disposed lateral to the surface of the mask in the predetermined plane.

60. The stage device according to claim 53, wherein

the mobile member has a first face disposed at a periphery of the retaining section and

at least a part of the outlet structure is disposed at a position opposite the first face.

61. The stage device according to claim 60, wherein the first face is substantially parallel to the surface of the mask retained on the retaining section.

62. The stage device according to claim 60, wherein the inflow port is far from the surface of the mask than the first face.

63. The stage device according to claim 60, wherein the surface of the mask retained on the retaining section is closer to the center of the mobile member than the first surface in a first direction substantially perpendicular to the predetermined plane.

64. The stage device according to claim 53, wherein the mobile member has a recessed portion and the retaining section is disposed in the recessed portion.

65. The stage device according to claim 64 wherein the surface of the mask retained on the retaining section is disposed inside the recessed portion.

66. The stage device according to claim 64, wherein

the surface of the mobile member is disposed at the periphery of the recessed portion, and

the surface of the mask is closer to the center of the mobile member than the surface of the mobile member in a direction which is substantially perpendicular to the surface of the mask retained on the retaining section.

67. The stage device according to claim 53, further comprising:

a second face that is disposed outside the intake structure with respect to the retaining section, and is illuminated with measuring light for measuring positional information of the mobile member.

68. The stage device according to claim 67 wherein the outlet port discharges gas in a direction which is different to the path of measuring light.

69. The stage device according to claim 53, wherein the intake structure comprises a nozzle member on which an inflow port, a second gas passage and a outlet port are provided.

70. The stage device according to claim 69, wherein the nozzle member is fixed to a predetermined position with reference to the mobile member.

71. The stage device according to claim 69, further comprising:

a drive device that is capable of moving the nozzle member to adjust a positional relationship between the mobile member and the nozzle member.

72. The stage device according to claim 53, wherein the outlet structure comprises a passage formation member that can form at least a part of the intake port, the second gas passage and the outlet port with the mobile member.

73. The stage device according to claim 53, further comprising:

a drive device that can move the passage formation member to adjust the positional relationship between the mobile member and the passage formation member.

74. The stage device according to claim 53, wherein at least a part of the outlet structure is disposed on the mobile member.

75. The stage device according to claim 53, wherein

the mobile member moves. in a second direction of the predetermined plane and

the intake port is disposed rearward of the moving mask in the second direction,

76. The stage device according to claim 53, wherein

the mobile member moves in a second direction of the predetermined plane and

the outlet structure is disposed respectively at both sides of the mask in the second direction.

77. The stage device according to claim 53, wherein the outlet port is larger than the inflow port.

78. The stage device according to claim 53, wherein the second gas passage gradually narrows from the inflow port towards the outlet port.

79. The stage device according to claim 53, wherein the inflow port is formed as a slit with a width which is substantially equal to the mask or larger than the width of the mask.