Exposure apparatus, exposure method, and device manufacturing method
First Claim
1. An exposure apparatus that exposes a substrate with an exposure beam, the exposure apparatus comprising:
- a first optical member from which the exposure beam is emitted;
a first object movable at a light-exit side of the first optical member;
a second object movable, independently of the first object, at the light-exit side of the first optical member; and
a driving unit that moves the first object and the second object in a first direction within a predetermined plane including a first position opposing the first optical member in a state in which the first object and the second object are close to or in contact with each other and in which positions of the first object and the second object in a second direction within the predetermined plane are shifted.
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Accused Products
Abstract
An exposure apparatus includes a first optical member from which an exposure beam is emitted; a first object movable at a light-exit side of the first optical member; a second object movable, independently of the first object, at the light-exit side of the first optical member; and a driving unit that moves the first object and the second object in a first direction within a predetermined plane including a first position opposing the first optical member in a state in which the first object and the second object are close to or in contact with each other and in which positions of the first object and the second object in a second direction within the predetermined plane are shifted.
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Citations
16 Claims
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1. An exposure apparatus that exposes a substrate with an exposure beam, the exposure apparatus comprising:
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a first optical member from which the exposure beam is emitted; a first object movable at a light-exit side of the first optical member; a second object movable, independently of the first object, at the light-exit side of the first optical member; and a driving unit that moves the first object and the second object in a first direction within a predetermined plane including a first position opposing the first optical member in a state in which the first object and the second object are close to or in contact with each other and in which positions of the first object and the second object in a second direction within the predetermined plane are shifted. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An exposure method for exposing a substrate with an exposure beam, the method comprising:
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bringing a first object and a second object, which are movable at a light-exit side of a first optical member from which the exposure beam is emitted, into close to or contact with each other in a first direction within a predetermined plane including a first position opposing the first optical member; moving the first object and the second object in the first direction in a state in which the first object and the second object are close to or in contact with each other and in which positions of the first object and the second object in a second direction within the predetermined plane are shifted. - View Dependent Claims (15, 16)
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Specification